6533b7d3fe1ef96bd125ffc0

RESEARCH PRODUCT

Spatial correction in dynamic photon emission by affine transformation matrix estimation

Stéphane BinczakPhilippe PerduSabir JacquirKevin SanchezSamuel Chef

subject

[ INFO.INFO-TS ] Computer Science [cs]/Signal and Image ProcessingMatching (graph theory)Computer science[INFO.INFO-TS] Computer Science [cs]/Signal and Image Processing[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics02 engineering and technology[ SPI.SIGNAL ] Engineering Sciences [physics]/Signal and Image processing[INFO.INFO-TS]Computer Science [cs]/Signal and Image ProcessingPosition (vector)020204 information systems0202 electrical engineering electronic engineering information engineeringComputer vision[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics[SPI.SIGNAL] Engineering Sciences [physics]/Signal and Image processingVery-large-scale integrationHarris affine region detectorbusiness.industryProcess (computing)Affine shape adaptationTransformation (function)020201 artificial intelligence & image processing[ SPI.NANO ] Engineering Sciences [physics]/Micro and nanotechnologies/MicroelectronicsArtificial intelligenceAffine transformationbusiness[SPI.SIGNAL]Engineering Sciences [physics]/Signal and Image processing

description

International audience; Photon emission microscopy and Time Resolved Imaging have proved their efficiency for defect localization on VLSI. A common process to find defect candidate locations is to draw a comparison between acquisitions on a normally working device and a faulty one. In order to be accurate and meaningful, this method requires that the acquisition scene remains the same between the two parts. In practice, it can be difficult to set. In this paper, a method to correct position by affine matrix transformation is suggested. It is based on image features detection, description and matching and affine transformation estimation.

https://hal.archives-ouvertes.fr/hal-01073233