Development of dark Ti(C,O,N) coatings prepared by reactive sputtering

6533b7d3fe1ef96bd12601d7

RESEARCH PRODUCT

Development of dark Ti(C,O,N) coatings prepared by reactive sputtering

Luc Imhoff Jean-françois Pierson Luís Miguel Cunha C. Moura M.c. Marco De Lucas Filipe Vaz J.m. Chappé Sylvie Bourgeois

subject

Materials science Silicon Reactive sputtering Analytical chemistry chemistry.chemical_element 02 engineering and technology Titanium oxycarbonitride 01 natural sciences Oxygen Sputtering 0103 physical sciences Materials Chemistry Thin film Spectroscopy Deposition (law)010302 applied physics Science & Technology Structure Surfaces and Interfaces General Chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics Surfaces Coatings and Films Amorphous solid chemistry Decorative properties 0210 nano-technology Titanium

description

Accepted manuscript

year	journal	country	edition	language
2008-06-30	Surface and Coatings Technology

https://doi.org/10.1016/j.surfcoat.2008.05.039

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