6533b7d3fe1ef96bd1260a8b
RESEARCH PRODUCT
Microhardness and adhesion measurements of reactively sputtered TiN/AlN multilayer coatings deposited as function of mass-flow of nitrogen
Gunnar SorensenJaroslav SobotaI. ManikaFaina MuktepavelaH. Jensensubject
Materials scienceBilayerMetallurgySurfaces and InterfacesGeneral ChemistrySubstrate (electronics)engineering.materialCondensed Matter PhysicsIndentation hardnessSurfaces Coatings and FilmsCoatingSputteringPhysical vapor depositionIndentationVickers hardness testMaterials ChemistryengineeringComposite materialdescription
Abstract Multilayer coatings of (Ti, Al)N x have been deposited by reactive sputtering from Ti and Al targets in a side-by-side configuration on WC and stainless steel substrates. The rotation of the substrate holder varied from 2 to 14 r.p.m. corresponding to a bilayer thickness of 0.8–8 nm. The acoustic emission scratch technique for adhesion measurements was used for studying coating performance, and critical load values for the coatings on WC substrate up to 150 N were obtained. The Vickers microhardness in the load range 0.003–2 N was measured, and in order to obtain true hardness values, an optimal range of indentation depth and coating thickness was determined. Depending on the nitrogen flow rate and bilayer thickness, hardness values of 18–23 GPa were obtained at the film surface.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 1998-03-01 |