6533b7d3fe1ef96bd126163c

RESEARCH PRODUCT

Tuning Optical Properties of Al 2 O 3 /ZnO Nanolaminates Synthesized by Atomic Layer Deposition

Donats ErtsRoman ViterRoman ViterArunas RamanaviciusIeva BaleviciutePhilippe MieleAdib Abou ChaayaMikhael BechelanyZanda GertnereValentyn Smyntyna

subject

Materials sciencePhotoluminescenceBand gapbusiness.industryNanotechnology02 engineering and technologyDielectric010402 general chemistry021001 nanoscience & nanotechnology01 natural sciences0104 chemical sciencesSurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsAtomic layer depositionGeneral EnergyQuantum dotEllipsometryMonolayerTransmittanceOptoelectronics[CHIM]Chemical SciencesPhysical and Theoretical Chemistry0210 nano-technologybusinessComputingMilieux_MISCELLANEOUS

description

Nanolaminates are of great interest for their unique properties such as high dielectric constants and advanced mechanical, electrical, and optical properties. Here we report on the tuning of optical and structural properties of Al2O3/ZnO nanolaminates designed by atomic layer deposition (ALD). Structural properties of nanolaminates were studied by SEM, GIXRD, and AFM. Optical characterization was performed by transmittance and photoluminescence (PL) spectroscopy. Complex study of monolayer properties was performed by ellipsometry. Optical constants for Al2O3 and ZnO monolayer were calculated. The band gap of ZnO single layers and the excitonic PL peak position were shifted to the UV region related to quantum confinement effects. No peaks in the UV region were observed in nanolaminates with 2 nm ZnO single layer thickness due to fully depleted region in small crystalline grains (<2 nm). The improved room temperature photoluminescence of nanolaminates makes them prominent materials for optical biosensors ap...

10.1021/jp411970whttps://hal.umontpellier.fr/hal-01687523