6533b7d7fe1ef96bd1268e6b
RESEARCH PRODUCT
Anisotropic and non-heterogeneous continuum percolation in titanium oxynitride thin columnar films
F. FabreguetteM. SacilottiJ P ClercMario MaglioneSylvie Bourgeoissubject
Materials scienceThin filmsMineralogychemistry.chemical_element02 engineering and technologyChemical vapor depositionConductivityNitride01 natural sciencesOxynitrideCondensed Matter::Materials ScienceElectrical resistivity and conductivityCondensed Matter::Superconductivity0103 physical sciencesChemical vapor depositionGeneral Materials ScienceMetalorganic vapour phase epitaxyThin film010306 general physicsAnisotropyTitaniumConductivityLow pressureCondensed matter physicsPercolation[CHIM.MATE]Chemical Sciences/Material chemistry021001 nanoscience & nanotechnologyCondensed Matter Physicschemistry[ CHIM.MATE ] Chemical Sciences/Material chemistry0210 nano-technologyTitaniumdescription
International audience; We report the percolation behaviour of the conductivity of titanium oxynitride films grown by low-pressure metal-organic chemical vapour deposition, composed of TiNxOy mixed with TiO2. The usual DC parameters (t, s and Φc), obtained from the effective media theory equations, are compared to the universal values (s = sun while t < tun because of the film anisotropy). This is the first example of an electrical continuum percolation applied to columnar films with chemically similar conducting and insulating units (non-heterogeneous percolation) whose mixing is based upon the growth temperature during the film growth.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2002-08-22 |