6533b7d8fe1ef96bd126a4ac
RESEARCH PRODUCT
Nonlinear vibrations and hysteresis of micromachined silicon resonators designed as frequency-out sensors
Miguel V. AndrésM.j. TudorK.w.h. Fouldssubject
Materials scienceSiliconbusiness.industrychemistry.chemical_elementVibrationResonatorHysteresisNonlinear systemReliability (semiconductor)chemistrySemiconductorsLimit (music)Electronic engineeringOptoelectronicsRestoring forceElectrical and Electronic EngineeringbusinessMaterialsdescription
Experimental observation of nonlinear vibrations and hysteresis of micromachined silicon resonators is reported. The experimental results are explained using a simple model in which the restoring force acting in the resonator contains a small cubic term. The effects will impose a limit to the maximum amplitude which can be excited while still maintaining reliability of these devices as frequency-out sensors.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 1987-01-01 |