0000000000252858
AUTHOR
M.j. Tudor
Silicon resonator sensors: interrogation techniques and characteristics
Interferometric and noninterferometric optical-fibre sensing systems for resonator vibrations are described. The quality factor variation with pressure, the temperature dependence of resonant frequency and the acceleration sensitivity are given for a double-ended tuning-fork based acceleratometer.
Nonlinear vibrations and hysteresis of micromachined silicon resonators designed as frequency-out sensors
Experimental observation of nonlinear vibrations and hysteresis of micromachined silicon resonators is reported. The experimental results are explained using a simple model in which the restoring force acting in the resonator contains a small cubic term. The effects will impose a limit to the maximum amplitude which can be excited while still maintaining reliability of these devices as frequency-out sensors.
Optical activation of a silicon vibrating sensor
The operation of a micromachined silicon vibrating sensor with both optical excitation and optical interrogation is reported. The proper locations at which the optical excitation should be applied for optimum excitation of different modes of resonance are described.
Analysis of an interferometric optical fibre detection technique applied to silicon vibrating sensors
A simple and accurate analysis of a single-mode optical fibre interferometric displacement detection technique is resented. This analysis is in good agreement with experimental measurements, and shows that angular alignment between the fibre and the sensor is the most critical parameter.