6533b833fe1ef96bd129ba16
RESEARCH PRODUCT
Optical activation of a silicon vibrating sensor
K.w.h. FouldsMiguel V. AndrésM.j. Tudorsubject
Materials scienceSiliconbusiness.industrychemistry.chemical_elementResonancePhysics::OpticsÒpticaVibracióPressure sensorSemiconductor detectorVibrationResonatorOpticschemistryVibration measurementElectrical and Electronic EngineeringbusinessExcitationdescription
The operation of a micromachined silicon vibrating sensor with both optical excitation and optical interrogation is reported. The proper locations at which the optical excitation should be applied for optimum excitation of different modes of resonance are described.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 1986-01-01 |