6533b7dbfe1ef96bd12713e7
RESEARCH PRODUCT
Stopping cross-section measurements of 4He in TiN1.1O0.27
K. VäkeväinenAurelio Climent-fontE. RauhalaJyrki Räisänensubject
010302 applied physicsNuclear and High Energy PhysicsMaterials scienceProjectile02 engineering and technologySubstrate (electronics)021001 nanoscience & nanotechnology01 natural sciencesSpectral lineCross section (physics)Tilt (optics)0103 physical sciencesAtomic physics0210 nano-technologyInstrumentationLayer (electronics)Beam energyEnergy (signal processing)description
Abstract The stopping cross-section for 4He projectiles in TiNx compounds has been measured using the backscattering method. A multi-compound marker layer deposited between the test film and the substrate was used to obtain the stopping cross-section at several energies with one energy of the incident beam. Two RBS spectra at definite tilt angles of the sample are taken for each beam energy. The assistance of computer codes to synthesize RBS spectra is very useful to obtain the pertinent information from the displacements of the peaks of the marker layers. Stopping cross-section values are obtained with an estimated uncertainty of about 6%.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2000-03-01 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms |