6533b81ffe1ef96bd12773ae

RESEARCH PRODUCT

Micromoulding of three-dimensional photonic crystals on silicon substrates

M. J. MintyPatrick FerrandJouni AhopeltoC. M. Sotomayor TorresSergei G. RomanovRudolf ZentelMarc Egen

subject

Materials scienceSiliconScanning electron microscopechemistry.chemical_elementBioengineering02 engineering and technology01 natural sciencesMicrosphereOpticsLattice (order)0103 physical sciencesGeneral Materials ScienceElectrical and Electronic Engineering010306 general physicsOptical reflectancePhotonic crystalchemistry.chemical_classification[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]business.industryMechanical EngineeringsiliconGeneral ChemistryPolymer021001 nanoscience & nanotechnologychemistryMechanics of Materialsphotonic crystalsOptoelectronicsSelf-assembly0210 nano-technologybusiness

description

International audience; The growth of three-dimensional photonic crystals (PhCs) on patterned silicon substrates is reported. It is shown that deep trenches can be uniformly filled by a self-assembly of polymer microspheres, in a close-packed face-centred cubic lattice. The crystalline quality is compared for different channel widths. These observations are confirmed by optical reflectance measurements in the visible range, showing a bandwidth of enhanced reflection. The possibility to detach the PhC, i.e. to use the substrate as a mould, is also demonstrated. The potential of this approach for building PhC-based complex architectures is discussed.

10.1088/0957-4484/14/2/343https://cris.vtt.fi/en/publications/5fb3586c-1f71-4aea-b59d-ac5ca0548a98