6533b823fe1ef96bd127ea6c
RESEARCH PRODUCT
Mechanical behavior and limits to the microhardness testing of hard multilayer coatings on soft substrates
I. ManikaGunnar SorensenFaina Muktepavelasubject
Optical coatingMaterials scienceCoatingSputteringIndentationMetallurgyVickers hardness testengineeringengineering.materialSputter depositionIndentation hardnessAmorphous soliddescription
Multilayer coatings of (Ti, Al) N x , (Ti, C)N x and (Nb, C)N x with bilayer thickness of 0.8-8 nm have been deposited by reactive sputtering on stainless steel substrates. Vickers microhardness measurements in the load range of 3.10 -3 to 1 N were performed using a self-adjusting tester. It has been shown that in order to obtain the true hardness of multilayer coatings on a softer substrate, the indentation depth should not exceed about 10% of the coating thickness. Indentation criteria for polycrystalline, amorphous and nanostructured multilayer coatings are compared. The obtained criterion for multilayer coatings is close to that for amorphous films.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2000-01-25 | SPIE Proceedings |