6533b826fe1ef96bd128456f

RESEARCH PRODUCT

Transparent conductive oxide photonic crystals on textured substrates

R. CariusRudolf ZentelT. BeckersMartin OttoRoland SalzerLorenz SteidlJohannes ÜPpingRalf B. WehrspohnRalf B. Wehrspohn

subject

Materials sciencebusiness.industryPhysics::OpticsSubstrate (electronics)Condensed Matter PhysicsAtomic and Molecular Physics and OpticsElectronic Optical and Magnetic MaterialsAtomic layer depositionPlanarHardware and ArchitectureOptoelectronicsElectrical and Electronic EngineeringbusinessLayer (electronics)Photonic crystalTransparent conducting film

description

Three-dimensional ZnO:Al photonic crystals were fabricated by atomic layer deposition on highly textured substrates. It turns out that these inverted opals consist of a thin intermediate disordered layer close to the textured substrate followed by a highly-ordered photonic crystal layer. The photonic crystals themselves exhibit comparable optical properties to those on planar substrates.

https://doi.org/10.1016/j.photonics.2010.07.008