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RESEARCH PRODUCT

Studies for low mass, large area monolithic silicon pixel detector modules using the MALTA CMOS pixel chip

Florian DachsA. F. HabibW. SnoeysHeinz PerneggerT. WangMateusz DyndalP. M. FreemanValerio DaoAbhishek SharmaP. PangaudCraig ButtarNorbert WermesL. Flores Sanz De AcedoI. Asensi TortajadaR. CardellaK. MoutsakasMarlon BarberoF. PiroPetra RiedlerTomasz HemperekHeidi SandakerI. BerdalovicThanushan Kugathasan

subject

Nuclear and High Energy PhysicsWire bondingParticle tracking detectors ; Radiation-hard detectors ; Electronic detector readout concepts ; CMOS sensors ; Monolithic active pixel sensorsHardware_PERFORMANCEANDRELIABILITY01 natural sciences030218 nuclear medicine & medical imaging03 medical and health sciences0302 clinical medicineModule0103 physical sciencesHardware_INTEGRATEDCIRCUITSWafer[PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det]Silicon pixel detectorsInstrumentationPhysicsInterconnectionPixel010308 nuclear & particles physicsbusiness.industryChipInterconnectionCMOSMonolithic pixel detectorsMALTAOptoelectronicsWafer dicingUltrasonic sensorbusinessHL-LHC

description

Abstract The MALTA monolithic silicon pixel sensors have been used to study dicing and thinning of monolithic silicon pixel detectors for large area and low mass modules. Dicing as close as possible to the active circuitry will allow to build modules with very narrow inactive regions between the sensors. Inactive edge regions of less than 5 μ m to the electronic circuitry could be achieved for 100 μ m thick sensors. The MALTA chip (Cardella et al., 2019) also offers the possibility to transfer data and power directly from chip to chip. Tests have been carried out connecting two MALTA chips directly using ultrasonic wedge wire bonding. Results from lab tests show that the data accumulated in one chip can be transferred via the second chip to the readout system, without the need of a flexible circuit to route the signals. The concept of chip to chip data and power transfer to achieve low mass modules has also been studied on prototype wafers using Cu-stud interconnection bridges. First results are presented, outlining technical challenges and possible future steps to achieve a low mass large area monolithic pixel sensor module.

10.1016/j.nima.2020.164895https://hal.science/hal-03115857