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RESEARCH PRODUCT

Detection of defects buried in metallic samples by scanning microwave microscopy

L. PachecoCédric PlassardEric BourillotYvon LacrouteJérôme RossignolEric LesniewskaE. Lepleux

subject

Materials sciencebusiness.industryAtomic force microscopyResolution (electron density)Condensed Matter PhysicsNetwork analyzer (electrical)Electromagnetic radiationElectronic Optical and Magnetic MaterialsMetalOpticsNondestructive testingvisual_artMicroscopyvisual_art.visual_art_mediumbusinessMicrowave

description

This paper reports the local detection of buried calibrated metal defects in metal samples by a new experimental technique, scanning microwave microscopy. This technique combines the electromagnetic measurement capabilities of a microwave vector network analyzer with the subnanometer-resolution capabilities of an atomic force microscope. The network analyzer authorizes the use of several frequencies in the range 1--6 GHz, allowing three-dimensional tomographical investigation, which is useful for the detection of bulk defects in metal materials.

https://doi.org/10.1103/physrevb.83.121409