6533b82efe1ef96bd1293bfb

RESEARCH PRODUCT

Optical grating recording in ChG thin film by electron beam

Vadims KolbjonoksA. GerbredersJanis TeterisVjaceslavs Gerbreders

subject

Materials scienceChalcogenidebusiness.industryfungiHigh selectivityAmine solventfood and beveragesHigh resolutionCondensed Matter PhysicsElectronic Optical and Magnetic Materialschemistry.chemical_compoundOpticschemistryMaterials ChemistryCeramics and CompositesCathode raysense organsThin filmbusinessLithographyDiffraction grating

description

Abstract Recording capabilities of As Se S chalcogenide (ChG) glasses using electron beam (EB) lithography have been investigated in this study. After exposure with EB the thin films of these inorganic glasses can be etched in alkaline amine solvent with high selectivity. High resolution, smooth shaped structures have been fabricated using ChG thin films. Height of developed pattern can be controlled through changing applied electron dose.

yearjournalcountryeditionlanguage
2013-10-01Journal of Non-Crystalline Solids
https://doi.org/10.1016/j.jnoncrysol.2013.01.053