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RESEARCH PRODUCT
Structural characterization of TiO2/TiN O (δ-doping) heterostructures on (1 1 0)TiO2 substrates
F. FabreguetteM.c. Marco De LucasLisandro Pavie CardosoRogério Valentim GelamoLuc ImhoffSylvie BourgeoisM. SacilottiT. ChiaramonteMarie-josé CasanoveY. Kihnsubject
010302 applied physicsMaterials scienceElectron energy loss spectroscopyGeneral Physics and Astronomy02 engineering and technologySurfaces and InterfacesGeneral Chemistry021001 nanoscience & nanotechnologyCondensed Matter PhysicsEpitaxy01 natural sciencesElectron spectroscopySurfaces Coatings and FilmsCrystallographySurface coatingTransmission electron microscopy0103 physical sciencesX-ray crystallography[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]Metalorganic vapour phase epitaxy0210 nano-technologyHigh-resolution transmission electron microscopyComputingMilieux_MISCELLANEOUSdescription
Abstract TiO2/TiNxOy δ-doping structures were grown on the top of (1 1 0)TiO2 rutile substrates by low pressure metal-organic vapor phase epitaxy (LP-MOVPE) technique at 750 °C. The samples were analyzed by high resolution transmission electron microscopy (HRTEM), electron energy loss spectroscopy (EELS) and X-ray diffraction techniques (rocking curves and φ-scans). The presence of satellites in the (1 1 0)TiO2 rocking curve revealed the epitaxial growth of 10 period δ-doping structures. The thickness of the TiO2 layers, 84 nm, was deduced from the satellites period. HRTEM observations showed around 1.5 nm thick δ-doping layers, where the presence of nitrogen was detected by EELS. The analysis of the Bragg surface diffraction peaks observed in the φ-scans points to an almost negligible strain in this sample which was confirmed by substrate curvature radius measurements.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2003-05-01 |