6533b835fe1ef96bd129fd51
RESEARCH PRODUCT
The lateral variation of solid state reactions at surfaces studied by means of photoemission electron microscopy: formation of titanium silicides
Oliver G. SchmidtG.h Fechersubject
X-ray absorption spectroscopySilicontechnology industry and agricultureAnalytical chemistrychemistry.chemical_elementSurfaces and Interfacesequipment and suppliesCondensed Matter PhysicsSurfaces Coatings and Filmslaw.inventionPhotoemission electron microscopychemistry.chemical_compoundchemistrylawSilicideMaterials ChemistryElectron microscopeAbsorption (chemistry)Chemical compositionTitaniumdescription
The alloying and oxygen reduction at titanium silicon interfaces were studied by means of photoemission microscopy. The microscopic chemical composition of the sample surface was characterised by means of imaging X-ray absorption. The silicide formation was studied at clean and oxidised silicon substrates both covered with micron-sized titanium patterns.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2001-06-01 | Surface Science |