6533b839fe1ef96bd12a6d6c

RESEARCH PRODUCT

Validation of a 3D mathematical model for feed rod melting during floating zone Si crystal growth

K. DadzisA. KrauzeM. PlāteJanis VirbulisRobert Menzel

subject

010302 applied physicsMaterials scienceSilicondigestive oral and skin physiologyProcess (computing)chemistry.chemical_elementCrystal growth02 engineering and technologyMechanicsGauge (firearms)021001 nanoscience & nanotechnologyCondensed Matter PhysicsInductor01 natural sciencesInorganic ChemistryDialAzimuthal asymmetrychemistry0103 physical sciencesHeat transferMaterials Chemistrysense organs0210 nano-technology

description

Abstract A mathematical model of global 3D heat transfer in floating zone silicon single crystal growth process is used to predict the shape of the open melting front of the feed rod. The model is validated using measurement data from research-scale growth experiments. Shape profiles of the open melting front are obtained from the feed rod leftover using a movable dial gauge. Azimuthal asymmetry of the rim of the open melting front is revealed in both simulations and measurements, quantitatively indicating the influence of the main slit of the inductor.

yearjournalcountryeditionlanguage
2019-09-01Journal of Crystal Growth
https://doi.org/10.1016/j.jcrysgro.2019.05.034