6533b83afe1ef96bd12a7bdd
RESEARCH PRODUCT
The effects of ion implantation damage to photonic crystal optomechanical resonators in silicon
Henri LyyraJuha MuhonenTeemu LoippoCliona Shakespearesubject
Materials scienceSiliconFOS: Physical sciencesPhysics::Opticschemistry.chemical_element02 engineering and technology01 natural sciencesCondensed Matter::Materials ScienceResonatorMesoscale and Nanoscale Physics (cond-mat.mes-hall)0103 physical sciencesion implantation010306 general physicsPhotonic crystalCondensed Matter - Materials ScienceCondensed Matter - Mesoscale and Nanoscale Physicsbusiness.industrytechnology industry and agricultureMaterials Science (cond-mat.mtrl-sci)silicon021001 nanoscience & nanotechnologyoptomechanicsIon implantationchemistryOptoelectronics0210 nano-technologybusinessnanomechanical resonatorphotonic crystalOptics (physics.optics)Physics - Opticsdescription
Abstract Optomechanical resonators were fabricated on a silicon-on-insulator substrate that had been implanted with phosphorus donors. The resonators’ mechanical and optical properties were then measured (at 6 K and room temperature) before and after the substrate was annealed. All measured resonators survived the annealing and their mechanical linewidths decreased while their optical and mechanical frequencies increased. This is consistent with crystal lattice damage from the ion implantation causing the optical and mechanical properties to degrade and then subsequently being repaired by the annealing. We explain these effects qualitatively with changes in the silicon crystal lattice structure. We also report on some unexplained features in the pre-anneal samples. In addition, we report partial fabrication of optomechanical resonators with neon ion milling.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2021-01-01 | Materials for Quantum Technology |