6533b851fe1ef96bd12a8d1e

RESEARCH PRODUCT

Alumina particle reinforced TiO2 composite films grown by direct liquid injection MOCVD

L. AvrilJulien BoudonLuc ImhoffM.c. Marco De Lucas

subject

Materials scienceSiliconScanning electron microscopeComposite numberNanoparticlechemistry.chemical_elementNanotechnologyCondensed Matter PhysicsSurfaces Coatings and Filmssymbols.namesakeChemical engineeringchemistrysymbolsParticleMetalorganic vapour phase epitaxyRaman spectroscopyInstrumentationTitanium

description

Abstract The use of a liquid injection delivery system to form composite films containing nanoparticles was investigated. Al 2 O 3 –TiO 2 films were grown on silicon substrates by direct liquid injection MOCVD (DLI-MOCVD) at 400 °C. The α-Al 2 O 3 nanoparticles (α-Al 2 O 3 NPs) dispersed in TiO 2 films resulted from co-deposition using colloidal α-Al 2 O 3 solution and titanium tetraisopropoxide as titanium precursor. Scanning electron microscopy coupled with EDS as well as Raman spectroscopy confirmed the presence of α-Al 2 O 3 NPs aggregates embedded in the TiO 2 matrix. The liquid injection system coupled with CVD technique can be promising to form composite films containing preformed nanoparticles.

yearjournalcountryeditionlanguage
2014-09-01Vacuum
https://doi.org/10.1016/j.vacuum.2014.02.020