6533b855fe1ef96bd12afcea

RESEARCH PRODUCT

Detection of gas trace of hydrofluoric acid using microcantilever

Eric FinotJohann MertensVincent EyraudMarie-hélène NadalEric BourillotOlivier Heintz

subject

CantileverSiliconMetals and AlloysAnalytical chemistrychemistry.chemical_elementSurface finishCondensed Matter PhysicsSurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsVolumetric flow ratechemistry.chemical_compoundHydrofluoric acidchemistryMaterials ChemistryElectrical and Electronic EngineeringSilicon oxideInstrumentationLayer (electronics)Stoichiometry

description

Abstract Microcantilevers have been used as a gas sensor in order to detect Hydrofluoric acid (HF) in the concentration range of 0.26–13 ppm. Silicon derived elements (Si 3 N 4 , SiO x ) were chosen to serve as chemical sensitive layer. Cantilever deflection and frequency shift were analyzed and compared as a function of the flow rate and the concentration of the HF molecules. The stoichiometry and roughness of the sensitive layer were found to be of major importance. Results show that the most appropriate signal at the lowest concentration ( x surface by HF. The frequency shift that is mainly governed by the loss in cantilever mass can be used at higher concentration.

yearjournalcountryeditionlanguage
2004-04-01Sensors and Actuators B: Chemical
https://doi.org/10.1016/j.snb.2003.10.030