Study of interface diffusion of Ti and TiN PVD layers by Bremsstrahlung-induced AES

6533b859fe1ef96bd12b7f9f

RESEARCH PRODUCT

Study of interface diffusion of Ti and TiN PVD layers by Bremsstrahlung-induced AES

subject

Chemistry Diffusion Analytical chemistry chemistry.chemical_element Surfaces and Interfaces General Chemistry Substrate (electronics)engineering.material Condensed Matter Physics Oxygen Nitrogen Surfaces Coatings and Films Coating X-ray photoelectron spectroscopy Chemical engineering Materials Chemistry engineering Tin Layer (electronics)

description

The influence of heat treatment in ultrahigh vacuum (UHV) on Ti and TiN layers coated by physical vapour deposition (PVD) has been studied by AES, XPS and bremsstrahlung-induced AES. It could be concluded that up to 500 o C (1 h) the Ti layer does not change significantly. At the TiN/steel substrate interface, however, a counter-diffusion of nitrogen and adventitious oxygen takes place, resulting in partial nitridation of the steel substrate and oxidation of the coating

year	journal	country	edition	language
1992-04-01	Surface and Interface Analysis

https://doi.org/10.1002/sia.740180407

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