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RESEARCH PRODUCT

Micro-Machining

subject

description

This chapter provides comprehensive knowledge regarding the fabrication of micro-products and element of micro-electromechanical systems using various techniques and processes. Both well-established techniques such as micro-machining and new trends in improving micro-processes taking into account EDM, laser, FIB, LIGA and DRIE processes are overviewed. The background of micro-machining processes, including typical machining operations such as turning, milling and drilling and different construction materials, is outlined. Moreover, a special focus was made on new constructions, control systems and effective applications of micro-machining techniques. In addition, the focus was directed towards the micro-tools applied, special tooling systems, fixturing systems and selection of machining conditions. All micro-machining techniques discussed are supported by new research works, original investigations and practical examples. In addition, measurement scaling to micro-levels is highlighted and a number of appropriate measuring devices and measurement systems are presented.