6533b85dfe1ef96bd12be890
RESEARCH PRODUCT
Ion beam shaping and downsizing of nanostructures
Pasi JalkanenKari-pekka RiikonenT. T. HongistoVladimir TuboltsevVladimir TuboltsevM. ZgirskiK. Yu. Arutyunovsubject
PhysicsCondensed Matter - Materials ScienceNanostructureIon beamCondensed Matter - Mesoscale and Nanoscale Physicsbusiness.industryMechanical EngineeringUltra-high vacuumPolishingMaterials Science (cond-mat.mtrl-sci)FOS: Physical sciencesBioengineering02 engineering and technologyGeneral Chemistry021001 nanoscience & nanotechnology01 natural sciencesMechanics of Materials0103 physical sciencesMesoscale and Nanoscale Physics (cond-mat.mes-hall)OptoelectronicsGeneral Materials ScienceElectrical and Electronic Engineering010306 general physics0210 nano-technologybusinessdescription
We report a new approach for progressive and well-controlled downsizing of nanostructures below the 10 nm scale. Low energetic ion beam (Ar+) is used for gentle surface erosion, progressively shrinking the dimensions with ~ 1 nm accuracy. The method enables shaping of nanostructure geometry and polishing the surface. The process is clean room / high vacuum compatible being suitable for various applications. Apart from technological advantages, the method enables study of various size phenomena on the same sample between sessions of ion beam treatment.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2011-08-06 |