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RESEARCH PRODUCT
Optical and structural properties of Al 2 O 3 /ZnO nanolaminates deposited by ALD method
Donats ErtsArunas RamanaviciusRoman ViterRoman ViterPhilippe MieleAdib Abou ChaayaValentyn SmyntynaIeva BaleviciuteMikhael Bechelanysubject
optical propertiesPhotoluminescenceMaterials sciencebusiness.industryAtomic force microscopyAnalytical chemistryCondensed Matter PhysicsCharacterization (materials science)Atomic layer depositionALDEllipsometryMonolayerTransmittance[CHIM]Chemical SciencesOptoelectronicsnanolaminatesphotoluminescencebusinessSpectroscopyellipsometrydescription
International audience; We report on the investigation of optical and structural properties of Al2O3/ZnO nanolaminates. The nanolaminates were deposited on Si and glass substrates by Atomic layer deposition method. Structural properties of nanolaminates were studied by SEM, GIXRD, and AFM. Optical characterization was performed by transmittance and photoluminescence spectroscopy. Complex analysis of monolayer properties was done by ellipsometry. Optical constants for Al2O3 and ZnO monolayer were calculated.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2014-09-01 | physica status solidi c |