6533b862fe1ef96bd12c6dca
RESEARCH PRODUCT
Fabrication of layered nanostructures by successive electron beam induced deposition with two precursors: protective capping of metallic iron structures
Marie-madeleine WalzChristian PappCharles S. FadleyCharles S. FadleyMichael SchirmerStefan CrammHans-peter SteinrückBenjamin BalkeHubertus MarbachFlorian KronastAlexander X. GrayAlexander X. Graysubject
Auger electron spectroscopyMaterials scienceNanostructureAbsorption spectroscopyMechanical Engineeringtechnology industry and agricultureAnalytical chemistrychemistry.chemical_elementBioengineeringGeneral ChemistryElectron spectroscopyIron pentacarbonylchemistry.chemical_compoundchemistryChemical engineeringMechanics of MaterialsGeneral Materials ScienceElectrical and Electronic EngineeringElectron beam-induced depositionLayer (electronics)Titaniumdescription
We report on the stepwise generation of layered nanostructures via electron beam induced deposition (EBID) using organometallic precursor molecules in ultra-high vacuum (UHV). In a first step a metallic iron line structure was produced using iron pentacarbonyl; in a second step this nanostructure was then locally capped with a 2-3 nm thin titanium oxide-containing film fabricated from titanium tetraisopropoxide. The chemical composition of the deposited layers was analyzed by spatially resolved Auger electron spectroscopy. With spatially resolved x-ray absorption spectroscopy at the Fe L₃ edge, it was demonstrated that the thin capping layer prevents the iron structure from oxidation upon exposure to air.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2011-11-04 | Nanotechnology |