3D modeling of growth ridge and edge facet formation in 〈100〉 floating zone silicon crystal growth process

6533b86efe1ef96bd12cb315

RESEARCH PRODUCT

3D modeling of growth ridge and edge facet formation in 〈100〉 floating zone silicon crystal growth process

Jānis Virbulis G. Ratnieks A. Krauze S. Zitzelsberger

subject

010302 applied physics Materials science Silicon Physics::Optics chemistry.chemical_element Crystal growth Geometry 02 engineering and technology Edge (geometry)021001 nanoscience & nanotechnology Condensed Matter Physics Ridge (differential geometry)01 natural sciences Inorganic Chemistry Monocrystalline silicon Crystal chemistry Condensed Matter::Superconductivity Free surface 0103 physical sciences Materials Chemistry Facet 0210 nano-technology

description

Abstract A 3D quasi-stationary model for crystal ridge formation in FZ crystal growth systems for silicon is presented. Heat transfer equations for the melt and crystal are solved, and an anisotropic crystal growth model together with a free surface shape solver is used to model the facet growth and ridge formation. The simulation results for 4″ and 5″ crystals are presented and compared to experimental ridge shape data.

year	journal	country	edition	language
2019-08-01	Journal of Crystal Growth

https://doi.org/10.1016/j.jcrysgro.2019.04.030

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