6533b870fe1ef96bd12d0733
RESEARCH PRODUCT
Observation of Knudsen effect with microcantilevers
Thomas ThundatAli PassianRobert J. WarmackFabrice MeriaudeauR. H. FarahiA. WigTrinidad L. Ferrellsubject
Microelectromechanical systemsMicroscopeSiliconAtomic force microscopyAnalytical chemistrychemistry.chemical_elementMechanicsAtomic and Molecular Physics and OpticsLinear functionComputer Science::OtherElectronic Optical and Magnetic Materialslaw.inventionKnudsen flowchemistryFree molecular flowlawKnudsen numberInstrumentationdescription
The Knudsen effect is estimated theoretically and observed experimentally using a U-shaped silicon microcantilever. Though Knudsen forces are extremely small in most cases involving microcantilevers, there exist situations where these forces can be significant and may be important in atomic force microscopy and in microelectromechanical systems (MEMS). The criteria for the presence of Knudsen forces are outlined and an analytical expression in the form of a linear function of the pressure is given for the force in the free molecular regime. The experimental results display peaks in the transitional regime while varying linearly in the molecular regime.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2003-10-01 | Ultramicroscopy |