Search results for "Elastic recoil"
showing 10 items of 43 documents
Irradiation-induced damage in porous low-k materials during low-energy heavy-ion elastic recoil detection analysis
2006
Abstract With the implementation of time-of-flight elastic recoil detection (ToF-ERD) for the analysis of thin films with high depth resolution using a standard ‘low-energy’ accelerator, routine application of ERD in semiconductor technology becomes possible. In case of irradiation-sensitive materials, like organosilicate low- k films, the energetic incident beam damages the sample during the measurement, resulting in loss of the lighter elements and, as a consequence, altering the sample composition. The ion beam induced damage is investigated for 19 F, 35 Cl, 63 Cu, 79 Br and 127 I beams at energies of 6–16 MeV and typical fluences for ERD analysis. By means of Fourier transform infrared …
Considerations about multiple and plural scattering in heavy-ion low-energy ERDA
2009
Abstract Low-energy heavy-ion Elastic Recoil Detection Analysis (ERDA) is becoming a mature technique for high-resolution characterization of thin films, i.e. below 50 nm thickness. In combination with a small tandem accelerator (∼2 MV terminal voltage) and beam energies below 20 MeV, it is suitable for routine analysis of key materials in semiconductor technology. At low-energies, however, small angle multiple scattering and large angle plural scattering of ions play a significant role, starting from the first nanometers. Multiple and plural scattering dominate the depth resolution deterioration with increasing depth and, when glancing angles are used, introduce long tails in the elemental…
Elastic Recoil Detection Analysis
2008
In 1976, a Canadian group described in detail for the first time a new ion beam analytical method based on the elastic recoil of target nuclei collided with high-energy heavy incident ions. In this case, 25–40-MeV 35Cl impinged on a multilayer C or Cu (backing)/LiF or LiOH/Cu (30–150 nm)/LiF or LiOH and H, Li, O, and F recoiled atoms were detected. These exemplified the main characteristics of elastic recoil detection analysis (ERDA): its sensitivity to depth distribution and its ability to detect light elements in heavy substrates. In 1979, the use of megaelectronvolt energy 4He beams permitted the use of ERDA to be extended to depth profiling of hydrogen isotopes in the near-surface regio…
Al2O3 ALD films grown using TMA + rare isotope 2H216O and 1H218O precursors
2021
Abstract In this work hydrogen and oxygen migration and exchange reactions in the atomic layer deposited (ALD) Al2O3 thin films were studied together with hydrogen incorporation by varying deposition parameters. Al2O3 films deposited at low temperatures can contain more than 20 at.% of hydrogen. Both higher temperature and longer purge length decrease the hydrogen and carbon concentrations significantly. In order to track the hydrogen and oxygen movement in the films, heavy water (2 H 2 16 O) and oxygen-18 enriched water (1 H 2 18 O) were used as precursors in combination with trimethylaluminium (TMA). Different isotopes of the same element were quantified by means of time-of-flight elastic…
Hydrogen influence on the structure and properties of amorphous hydrogenated carbon films deposited by direct ion beam
2008
Abstract The present work provides results for amorphous hydrogenated carbon (a-C:H) films grown by direct ion beam deposition method. Acetylene and its mixtures with hydrogen were used. The films were characterized by Rutherford backscattering spectrometry, elastic recoil detection, Raman spectroscopy, ellipsometry, infrared spectroscopy, and microhardness measurements. These techniques indicated that an admixture of hydrogen yields a lower deposition rate, a higher content of total and bounded hydrogen in the a-C:H films, and a lower film density. The optical and mechanical properties depend on both, hydrogen concentrations in the gas phase and in the films, and show a strong diamond-like…
Comparison of myocardial perfusion reserve before and after coronary balloon predilatation and after stent implantation in patients with postangiopla…
1996
Background Stents provide a scaffold for coronary arteries after angioplasty and inhibit elastic recoil. Methods and Results In 25 patients with postangioplasty restenosis of the left anterior descending artery, ECG-gated digital subtraction coronary angiograms were recorded at baseline and during hyperemia (12 mg papaverine IC) before and after balloon predilatation (PTCA), after implantation of a Palmaz-Schatz stent, and after 6 months. Densitometric evaluation revealed different time and density parameters to calculate two definitions of myocardial perfusion reserve (MPR1 and MPR2) and maximum flow ratio (MaxFR). Poststenotic MPR1 increased from 1.57±0.14 to 2.59±0.86 after PTCA and to …
Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition
2013
Impurities in aluminum nitride films prepared by plasma enhanced atomic layer deposition using NH3-, N2/H2- and N2-based plasmas are investigated by combining time-of-flight elastic recoil detection analysis (ERDA) and Fourier transform infrared spectroscopy. Different atomistic growth mechanisms are found to exist between the plasma chemistries. N2-plasma is shown as not suitable for the low-temperature deposition of AlN. Films deposited by NH3- and N2/H2-based processes are nitrogen rich and heavily hydrogenated. Carbon impurities exist at higher concentrations for the N2/H2-processes. The discovery of nitrile groups in the films indicates that carbon impurities can be partially attribute…
Studies on atomic layer deposition of MOF-5 thin films
2013
International audience; Deposition of MOF-5 thin films from vapor phase by atomic layer deposition (ALD) was studied at 225-350 degrees C. Zinc acetate (ZnAc2) and 1,4-benzenedicarboxylic acid (1,4-BDC) were used as the precursors. The resulting films were characterized by UV-Vis spectrophotometry, Fourier transform infrared spectroscopy (FTIR), optical microscopy, X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), time-of-flight elastic recoil detection analysis (TOF-ERDA), isopropanol adsorption tests, and nanoindentation. It was found out that the as-deposited films were amorphous but crystallized in humid conditions at room temperature. The crystalline films h…
Corrosion Protection of Steel with Oxide Nanolaminates Grown by Atomic Layer Deposition
2011
Atomic layer deposited (ALD) aluminum and tantalum oxide (Al 2 O 3 and Ta 2 O 5 ) and their nanolaminates were applied as corrosion protection coatings on AISI 52100 steel. The aim was to combine the good sealing properties of Al 2 O 3 with the chemical stability of Ta 2 O 5 and to optimize the coating architecture in order to obtain the best possible long-term durability. Coating composition and morphology were studied with time-of-flight elastic recoil detection analysis (ToF-ERDA), time-of-flight secondary ion mass spectrometry (ToF-SIMS) and field emission scanning electron microscopy (FESEM) and energy dispersive x-ray spectrometry (EDS). Electrochemical properties were studied with vo…
Thermal atomic layer deposition of AlOxNy thin films for surface passivation of nano-textured flexible silicon
2019
Abstract Aluminum oxynitride (AlOxNy) films with different nitrogen concentration are prepared by thermal atomic layer deposition (ALD) for flexible nano-textured silicon (NT-Si) surface passivation. The AlOxNy films are shown to exhibit a homogeneous nitrogen-doping profile and the presence of an adequate amount of hydrogen, which is investigated by Time-of-Fight Elastic Recoil Detection Analysis (ToF-ERDA). The effective minority carrier lifetimes are measured after the NT-Si surface passivation; the minimum surface recombination velocity (SRV) of 5 cm-s−1 is achieved with the AlOxNy film in comparison to the Al2O3 and AlN films (SRV of 7–9 cm-s−1). The better SRV with AlOxNy film is due …