Search results for "Image resolution"
showing 10 items of 377 documents
A new approach for actinic defect inspection of EUVL multilayer mask blanks: Standing wave photoemission electron microscopy
2006
Extreme ultraviolet lithography (EUVL) at 13.5 nm is the next generation lithography technique capable of printing sub-50 nm structures. With decreasing feature sizes to be printed, the requirements for the lithography mask also become more stringent in terms of defect sizes and densities that are still acceptable and the development of lithography optics has to go along with the development of new mask defect inspection techniques that are fast and offer high resolution (preferable in the range of the minimum feature size) at the same time. We report on the development and experimental results of a new 'at wavelength' full-field imaging technique for defect inspection of multilayer mask bl…
Simulated one-pass list-mode: an approach to on-the-fly system matrix calculation.
2013
In the development of prototype systems for positron emission tomography a valid and robust image reconstruction algorithm is required. However, prototypes often employ novel detector and system geometries which may change rapidly under optimization. In addition, developing systems generally produce highly granular, or possibly continuous detection domains which require some level of on-the-fly calculation for retention of measurement precision. In this investigation a new method of on-the-fly system matrix calculation is proposed that provides advantages in application to such list-mode systems in terms of flexibility in system modeling. The new method is easily adaptable to complicated sy…
Methods cooperation for multiresolution motion estimation
2002
For a medical application, we are interested in an estimation of optical flow on a patient's face, particularly around the eyes. Among the methods of optical flow estimation, gradient estimation and block matching are the main methods. However, the gradient-based approach can only be applied for small displacements (one or two pixels). Gener- ally, the process of block matching leads to good results only if the searching strategy is judiciously selected. Our approach is based on a Markov random field model, combined with an algorithm of block match- ing in a multiresolution scheme. The multiresolution approach allows de- tection of a large range of speeds. The large displacements are detect…
Performance of TES method over urban areas at a high spatial resolution scale
2013
The Temperature and Emissivity Separation (TES) algorithm is used to retrieve the LSE and LST values from hyperspectral sensors. In this work we analyse the performance of this methodology over urban areas. Three different sources of error in the processing chain of the remote sensing imagery are detected: the algorithm itself, the atmospheric correction and the 3D structure of the urban scenes. The TITAN tool is used to model all the radiative components of the signal registered by a sensor. Results show that: first, the TES algorithm used reproduces the LSE (LST) of urban materials within an RMSE of 0.017 (0.9 K). Second, 20 % of uncertainty in the water vapour content of the total atmosp…
Synergetic exploitation of the Sentinel-2 missions for validating the Sentinel-3 ocean and land color instrument terrestrial chlorophyll index over a…
2019
Continuity to the Medium Resolution Imaging Spectrometer (MERIS) Terrestrial Chlorophyll Index (MTCI) will be provided by the Ocean and Land Color Instrument (OLCI) on-board the Sentinel-3 missions. To ensure its utility in a wide range of scientific and operational applications, validation efforts are required. In the past, direct validation has been constrained by the need for costly airborne hyperspectral data acquisitions, due to the lack of freely available high spatial resolution imagery incorporating appropriate spectral bands. The Multispectral Instrument (MSI) on-board the Sentinel-2 missions now offers a promising alternative. We explored the synergetic use of MSI data for validat…
Mapping daily global solar irradiation over Spain: A comparative study of selected approaches
2011
Abstract Three methods to estimate the daily global solar irradiation are compared: the Bristow–Campbell (BC), Artificial Neural Network (ANN) and Kernel Ridge Regression (KRR). BC is an empirical approach based on air maximum and minimum temperature. ANN and KRR are non-linear approaches that use temperature and precipitation data (which have been selected as the best combination of input data from a gamma test). The experimental dataset includes 4 years (2005–2008) of daily irradiation collected at 40 stations and temperature and precipitation data collected at 400 stations over Spain. Results show that the ANN method produces the best global solar irradiation estimates, with a mean absol…
About the Problem of Scaling from Ground Measurements to Low Resolution Satellite Data
2005
Only satellite data can really produce "global" datasets, and the role of satellite data in the study of global processes is really essential, but ground measurements are also needed to calibrate satellite data and to validate models routinely working with satellite data inputs. The problem of comparing ground measurements with the measurements made by a satellite, particularly in the case of low resolution data (as NOAA AVHRR) imply the consideration of the problem of scaling, both in the case of particular measurements and in the case of mathematical models relating such measurements. Within the context of the EFEDA field experiment, the problem of scaling from ground measurements to low …
Spectrodirectional Minnaert-kretrieval using CHRIS-PROBA data
2010
We report on a detailed analysis of hyperspectral and multidirectional remote sensing data acquired using the Compact High Resolution Imaging Spectrometer (CHRIS) mounted onboard the Project for On-Board Autonomy (PROBA) spacecraft. This instrument is capable of sampling reflected radiation over the visible and near-infrared (NIR) region of the solar spectrum at a spatial resolution (approx. 17 m) intermediary between sensors traditionally used in land applications (such as Landsat and Satellite Pour l’Observation de la Terre (SPOT), 30 m–50 m) and the latest instruments delivering a nominal resolution of 1 m or less. The spectral anisotropic signature of an Alpine coniferous forest during …
Design for a high resolution electron energy loss microscope.
2019
International audience; An electron optical column has been designed for High Resolution Electron Energy Loss Microscopy (HREELM). The column is composed of electron lenses and a beam separator that are placed between an electron source based on a laser excited cesium atom beam and a time-of-flight (ToF) spectrometer or a hemispherical analyzer (HSA). The instrument will be able to perform full field low energy electron imaging of surfaces with sub-micron spatial resolution and meV energy resolution necessary for the analysis of local vibrational spectra. Thus, noncontact, real space mapping of microscopic variations in vibrational levels will be made possible. A second imaging mode will al…
Shaded-mask filtering: novel strategy for improvement of resolution in radial-polarization scanning microscopy
2006
Radially polarized illumination produces, in combination with annular pupil filtering, the sharpest focal spot. However, the enhanced sidelobes produce an effective deterioration of spatial resolution. This study shows that if one substitutes the annular filter by one, adequately designed, shaded-mask filter, the sidelobes' strength is strongly reduced, and an important, effective improvement of resolution is achieved.