Search results for "Lithography"

The influence of AlN buffer over the polarity and the nucleation of self-organized GaN nanowires

2015

We experimentally investigate the influence of AlN buffer growth on the nucleation and the polarity of a self-organized assembly of GaN nanowires (NWs) grown on Si. Two complementary growth mechanisms for AlN buffer deposited on Si are demonstrated. Both emphasize the aggregation of Si on the AlN surface and the growth of large cubic crystallites, namely, AlN pedestals. Further growths of GaN NWs assembly reveal that the GaN 2D layer found at the bottom of the NW assembly is the result of the coalescence of Ga-polar pyramids, whereas AlN pedestals are observed as preferential but not exclusive NW nucleation sites. NWs are N-polar or exhibit inversion domains with a Ga-polar core/N-polar she…

Polarity conversion of GaN nanowires grown by plasma-assisted molecular beam epitaxy

2019

International audience; It is demonstrated that the N-polarity of GaN nanowires (NWs) spontaneously nucleated on Si (111) by molecular beam epitaxy can be reversed by intercalation of an Al-or Ga-oxynitride thin layer. The polarity change has been assessed by a combination of chemical etching, Kelvin probe force microscopy, cathodo-and photoluminescence spectroscopy and transmission electron microscopy experiments. Cathodoluminescence of the Ga-polar NW section exhibits a higher intensity in the band edge region, consistent with a reduced incorporation of chemical impurities. The polarity reversal method we propose opens the path to the integration of optimized metal-polar NW devices on any…

High spatial resolution strain measurements at the surface of duplex stainless steels

2007

International audience; The determination of local strain fields at the surface of materials is of major importance for understanding their reactivity. In the present paper, lithography is used to fabricate grid points at the microscale and to map strain gradients within grains and between grains. This method was applied to duplex stainless steels which exhibit heterogeneous strain distributions under straining conditions. The influence of various parameters (the specimen microstructure, the density of slip bands, the number of systems activated and the grid geometry) on the strain value was discussed.

Enhancing the sound absorption of small-scale 3D printed acoustic metamaterials based on Helmholtz resonators

2018

Acoustic metamaterials have recently become of interest for their ability to attenuate sound by breaking the mass-density law. In this paper, acoustic metamaterials based on Helmholtz resonators and capable of attenuating sound up to 30 dB are fabricated for sound absorption applications in the small scale. The proposed metamaterials are subwavelength at a factor of $\lambda /12$ with respect to the lateral dimension of the units. The directional response due to the position of the acoustic source on the sound attenuation provided by the metamaterial is investigated by controlling the location of a loudspeaker with a robot arm. To enhance and broaden the absorption bands, structural modific…

Large area conductive nanoaperture arrays with strong optical resonances and spectrally flat terahertz transmission

2017

Using simple and inexpensive nanosphere lithography, we produce large, centimeter-squared sized thin golden films patterned with a hexagonal array of nanoapertures with controllable dimensions on the order of 100–300 nm, spaced by a 350–375 nm pitch distance. The optical transmission spectra of our samples are dominated by the resonant plasmonic features in the spectral range 500–700 nm, caused by the nanostructure in the film. At the same time, the transmission at terahertz (THz) radiation is as high as ∼10% and is spectrally flat. Our measurements are in agreement with finite difference time domain simulations. Such thin metal hole array films allow for very efficient injection of optical…

Nanoscale strain-engineering and optics of quantum emitters in a two-dimensional semiconductor

2017

We present deterministic fabrication of a two-dimensional lattice of quantum emitters in an atomically thin semiconductor. Resonant laser spectroscopy of these emitters reveals localized exciton states that exhibit stable, bright and high-purity single photon emission.

2019

Structural DNA nanotechnology provides a viable route for building from the bottom-up using DNA as construction material. The most common DNA nanofabrication technique is called DNA origami, and it allows high-throughput synthesis of accurate and highly versatile structures with nanometer-level precision. Here, it is shown how the spatial information of DNA origami can be transferred to metallic nanostructures by combining the bottom-up DNA origami with the conventionally used top-down lithography approaches. This allows fabrication of billions of tiny nanostructures in one step onto selected substrates. The method is demonstrated using bowtie DNA origami to create metallic bowtie-shaped an…

The emerging role of 3D printing in the fabrication of detection systems

2021

Abstract 3D printing is fast evolving as an additive manufacturing technique that has been adopted in (bio)analytical science because of the ample variety of materials and technologies currently available for highly affordable prototyping. This review focuses on the unique characteristics of 3D printing for manufacturing of optical and electrochemical detection systems, and sampling interfaces for analytical purposes using fused deposition modelling, vat polymerization (stereolithography and digital light processing) and photopolymer inkjet printing. The majority of works surveyed within the time span of mid-2018 to mid-2020 encompassed the fabrication of several components of the detection…

Fast and blister-free irradiation conditions for cross-linking of PMMA induced by 2MeV protons

2013

For soft lithography, the conventional negative tone resists, such as SU-8, that are used to create the mold have a number of drawbacks. PMMA, which is normally used as a positive tone resist, can be used as a negative resist by using high-fluence irradiation conditions. In this report, we outline optimization of the irradiation conditions for PMMA thin films using 2MeV H^+ ions to exploit their ability to work as a negative tone resist at ion fluences above 1.0x10^1^5ionscm^-^2. The main aim was to induce cross-linking while maintaining the exposed regions free of blisters and maintaining short irradiation times. We found that by using a two-step process with a low-flux irradiation, follow…

Photonic-crystal silicon-nanocluster light-emitting device

2006

We report on enhanced light extraction from a light-emitting device based on amorphous silicon nanoclusters, suitable for very-large-scale integration, and operating at room temperature. Standard low-cost optical lithography is employed to fabricate a two-dimensional photonic crystal onto the device. We measured a vertical emission with the extracted radiation enhanced by over a factor of 4, without the aid of any buried reflector. These achievements demonstrate that a cost-effective exploitation of photonic crystals is indeed within the reach of semiconductor industry and open the way to a new generation of nanostructured silicon devices in which photonic and electronic functions are integ…