Search results for "backscattering"
showing 10 items of 42 documents
Electrostatic backscattering by insulating obstacles
2012
AbstractWe introduce and analyze backscattering data for a three-dimensional obstacle problem in electrostatics. In particular, we investigate the asymptotic behavior of these data as (i) the measurement point goes to infinity and (ii) the obstacles shrink to individual points. We also provide numerical simulations of these data.
Time-of-flight telescope for heavy-ion RBS
2007
Abstract This paper describes a time-of-flight (TOF) spectrometer for Heavy-Ion Rutherford Backscattering Spectrometry (HI-RBS) recently installed at IMEC for thin film analysis. The TOF telescope allows the use of ion beams heavier than He, with advantages in terms of depth and mass resolution and sensitivity compared to conventional RBS based on planar Si detectors. The start timing-signal is produced by the secondary electrons emitted from a thin C foil when traversed by a backscattered ion; the electrons are deflected in an electrostatic mirror towards a Micro-channel plate (MCP) assembly which provides a fast timing response. The stop signal is obtained directly from a second MCP assem…
Synthesis and characterization of cobalt silicide films on silicon
2006
Cobalt silicide has emerged as a leading contact material in silicon technology due to its low resistivity, high stability and small lattice mismatch. In this study, 0.2-0.4 mu m thick Co films were deposited on Si(100) wafers by RF magnetron sputtering at room temperature, and annealed at temperatures from 600 to 900 degrees C in vacuum. As-deposited and annealed samples were characterized by Rutherford backscattering spectrometry (RBS), nuclear reaction analysis (NRA), X-ray diffraction (XRD) and scanning electron microscopy (SEM). Although the Si substrates were sputter cleaned before the deposition, all the samples showed a thin oxide layer at the Si/Co interfaces. Annealing up to 700 d…
Electron Emission of Pt: Experimental Study and Comparison With Models in the Multipactor Energy Range
2016
Experimental data of secondary emission yield (SEY) and electron emission spectra of Pt under electron irradiation for normal incidence and primary energies lower than 1 keV are presented. Several relevant magnitudes, as total SEY, elastic backscattering probability, secondary emission spectrum, and backscattering coefficient, are given for different primary energies. These magnitudes are compared with theoretical or semiempirical formulas commonly used in the related literature.
A study of solar thermal absorber stack based on CrAlSiNx/CrAlSiNxOy structure by ion beams
2019
Renewable energies are foreseen as a major energy resource for next generations. Among several energy sources and technologies available, Concentrated Solar Power (CSP) technology has a great potential, but it needs to be optimised, in particular to reduce the costs, with an increase of the operating temperature and long term stability. This goal can be achieved by tailoring the composition and multilayer structure of films. In this work we present and discuss the results obtained from solar absorber coatings based on nitride/oxynitride structures. A four-layer film structure, W/CrAlSiNx(HA)/CrAlSiNxOy(LA)/SiAlOx, was deposited on stainless steel substrates using magnetron sputtering deposi…
Characterization of alpha sources prepared by direct evaporation using Rutherford backscattering spectrometry
1997
Abstract Standardization of solutions containing alpha emitting nuclides by direct evaporation onto metal supports is a widely used technique due to its simplicity in providing good quantitative results. In order to avoid inhomogeneity in the deposition surface, polished stainless steel disks and a spreading agent are generally used. These sources are usually measured by alpha spectrometry using passivated implanted silicon detectors. The resolution of the source is a measure of the thickness and homogeneity of the evaporated layer. Rutherford backscattering of He+ and H+ was here used to measure directly this thickness and homogeneity. The results were in agreement with semiconductor detec…
The optical system of the A4 laser Compton polarimeter
2007
Compton backscattering polarimeters for experiments at sub-mA accelerator facilities use optical cavities to increase the laser light intensity. Therefore, parasitic properties of the optical elements have an increased influence on the polarization state of the light and need to be analyzed carefully. This contribution shows examples of such difficulties and the possible solutions, found during the setup of the A4 Compton backscattering polarimeter at the MAMI accelerator facility of the university of Mainz.
High quality epitaxial Mn 2 Au (001) thin films grown by molecular beam epitaxy
2020
The recently discovered phenomenon of Neel spin–orbit torque in antiferromagnetic Mn2Au [Bodnar et al., Nat. Commun. 9, 348 (2018); Meinert et al., Phys. Rev. Appl. 9, 064040 (2018); Bodnar et al., Phys. Rev. B 99, 140409(R) (2019)] has generated huge interest in this material for spintronics applications. In this paper, we report the preparation and characterization of high quality Mn2Au thin films by molecular beam epitaxy and compare them with magnetron sputtered samples. The films were characterized for their structural and morphological properties using reflective high-energy electron diffraction, x-ray diffraction, x-ray reflectometry, atomic force microscopy, and temperature dependen…
Formation of cobalt silicide from filter metal vacuum arc deposited films
2006
The thermal reaction of Co film deposited on Si(111) surfaces by a high current filter metal vacuum arc (FMEVAD) system has been studied. After deposition the films were annealed over the 400-900 degrees C temperature range for 30 min. Rutherford backscattering spectrometry (RBS) was used to characterize the elemental depth distributions in the films subjected to different annealing temperatures. Ordered chemical phases were determined by glancing-incidence X-ray diffraction (GIXRD) and the morphology was determined by cross section transmission electron microscopy (TEM). The results show that the phases formed are Co2Si at 400 degrees C, CoSi + Coo at 500 degrees C, CoSi + CoSi2 at 600 deg…
Nucleation and growth of ZnO on PMMA by low-temperature atomic layer deposition
2015
ZnO films were grown by atomic layer deposition at 35 °C on poly(methyl methacrylate) substrates using diethylzinc and water precursors. The film growth, morphology, and crystallinity were studied using Rutherford backscattering spectrometry, time-of-flight elastic recoil detection analysis, atomic force microscopy, scanning electron microscopy, and x-ray diffraction. The uniform film growth was reached after several hundreds of deposition cycles, preceded by the precursor penetration into the porous bulk and island-type growth. After the full surface coverage, the ZnO films were stoichiometric, and consisted of large grains (diameter 30 nm) with a film surface roughness up to 6 nm (RMS). T…