Search results for "etching"
showing 10 items of 186 documents
Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas
2012
The plasma etch characteristics of aluminum nitride (AlN) deposited by low-temperature, 200 °C, plasma enhanced atomic layer deposition (PEALD) was investigated for reactive ion etch (RIE) and inductively coupled plasma-reactive ion etch (ICP-RIE) systems using various mixtures of SF6 and O2 under different etch conditions. During RIE, the film exhibits good mask properties with etch rates below 10r nm/min. For ICP-RIE processes, the film exhibits exceptionally low etch rates in the subnanometer region with lower platen power. The AlN film’s removal occurred through physical mechanisms; consequently, rf power and chamber pressure were the most significant parameters in PEALD AlN film remova…
A polarimetric sensor based on nanoporous free standing membranes
2012
A polarimetric sensor with state of the art sensitivity is developed using free standing porous silicon membranes. The use of an optimized etching receipt greatly reduces the pore roughness. Depolarization factors are thus limited and material birefringence is increased. Free standing membranes are fabricated in n-type substrates and characterized both from the optical and structural point of view. The proposed approach is fully CMOS compatible and can therefore pave the way to the development of cheap microarray that exploits multiplexing capabilities while keeping the amount of analyte required by the analysis down to the microliter level.
MEMS analogous micro-patterning of thermotropic nematic liquid crystalline elastomer films using a fluorinated photoresist and a hard mask process
2017
In this work, we present a method to pattern liquid crystal elastomers (LCEs) in the micrometer range without using any mechanical processing steps to prepare micron sized LCE actuators compatible with microelectromechanical system (MEMS) technology. Multi-layer spin-coating processes are developed to synthesise and structure 300–3500 nm thick LCE films. A water soluble sacrificial layer, a photoalignment layer and a LCE formulation, which is polymerised and crosslinked in its liquid crystal phase, are spin-coated successively onto a substrate. A fluorinated photoresist layer is used to structure LCE films with thicknesses up to 700 nm in a photolithographic and etching process. For thicker…
TEM morphological characterization of a one-step self-etching system applied clinically to human caries-affected dentin and deep sound dentin
2013
Purpose: To examine morphologically the hybrid layer of one-step self-etching adhesive, Clearfil S3 Bond (S3bond), in caries-affected dentin (CAD) and deep sound dentin (DSD) cavities performed clinically. For a comparative group, the two-step self etching adhesive Clearfil Protect Bond (Pbond) was used in a similar clinical situation. Methods: This study was carried out on carious and sound teeth clinically selected for extraction. In carious teeth, CAD was obtained by way of subjective criteria by removing infected tissue to form a cavity bottom. DSD was obtained at a depth of 4 mm in the dentin cavity of sound teeth. S3bond and Pbond were applied in the CAD and DSD cavities as indicated …
Effect of a plant-based hemostatic agent on microleakage of self-etching adhesives
2012
Objective: This in vitro study evaluated the effect of Ankaferd Blood Stopper (ABS) contamination on the micro-leakage of one-step and two-step self-etching adhesives.
Evaluation of the enamel etching pattern of self-etching adhesives
2010
Objectives: To evaluate the capacity of seven self-etching adhesives (SEAs) to demineralize ground enamel in comparison with traditional phosphoric acid etchant (PAE) using SEM and statistical analysis. Materials and methods: 80 caries-free extracted human third molars were divided into 8 groups ( n = 10). Enamel bur-cut surfaces were prepared and, strictly following the manufacturers’ instructions, treated with three priming agents of two-step self-etching adhesives: Aqua Resulcin Prime (Group 1); Peak™ (Group 2); Clearfil Protect Bond (Group 3); four one-step self-etch (all-in-one) adhesives, G-Bond (Group 4); Artegral One (Group 5); Clearfil S3 Bond (Group 6); Adper Easy Bond (Group 7); …
Marginal quality of a full-body bulk-fill composite placed with an universal adhesive system in etch-and-rinse and self-etch mode: An
2020
Background Marginal seal of a nanohybrid bulk-fill composite compared to a nanohybrid conventional composite, using a universal adhesive (UA) applied in etch-and-rinse (ER) and self-etch (SE) mode was investigated. Material and Methods Thirty-six intact molars were selected and two standardized cavities in each tooth were prepared and allocated into four groups according to restorative material and etching strategy. All samples were placed in a 1% methylene blue solution for 24 h, then cut in the middle of the restorations obtaining two parts (n=144) and used for microscopic evaluation (50x) for dye penetration measurements. Results The data were analysed by ANOVA and Tukey post-hoc test (p…
Morphology Study of the Porosity of the GaP Surface Layer Formed on the Surface of a Single Crystal by Electrochemical Etching
2021
The article analyzes the morphological characteristics of a porous GaP surface layer formed on the surface of monocrystalline gallium phosphide by electrochemical etching. The correlations between the etching time and the appropriate size, shape and density of pores have been established and studied in detail.
Acute effects of static and dynamic stretching on the neuromuscular system
2019
Stretching is traditionally incorporated into pre-exercise routines in health, rehabilitation and sporting environments to condition the neuromuscular system for exercise. While a large body of evidence reported that stretching may acutely impair the subsequent muscular performance, some conflicting results highlight possible mitigating factors of neuromuscular responses variability. Because the limited data available do not present a clear consensus, the aim of this thesis was to investigate the effects of different factors on neuromuscular responses to stretch: the muscle group, the stretch duration and modality. By means of four studies, it has been shown that static stretching may alter…
Single cigar-shaped nanopores functionalized with amphoteric amino acid chains: experimental and theoretical characterization.
2012
We present an experimental and theoretical characterization of single cigar-shaped nanopores with pH-responsive carboxylic acid and lysine chains functionalized on the pore surface. The nanopore characterization includes (i) optical images of the nanostructure obtained by FESEM; (ii) different chemical procedures for the nanopore preparation (etching time and functionalizations; pH and electrolyte concentration of the external solution) allowing externally tunable nanopore responses monitored by the current-voltage (I-V) curves; and (iii) transport simulations obtained with a multilayer nanopore model. We show that a single, approximately symmetric nanopore can be operated as a reconfigurab…