Hardness and modulus of elasticity of atomic layer deposited Al2O3-ZrO2 nanolaminates and mixtures

6533b7d6fe1ef96bd1265dde

RESEARCH PRODUCT

Hardness and modulus of elasticity of atomic layer deposited Al2O3-ZrO2 nanolaminates and mixtures

R. Zabels Taivo Jõgiaas Aivar Tarre Aile Tamm

subject

Materials science Atomic layer deposition Young's modulus 02 engineering and technology Substrate (electronics)Nanoindentation 010402 general chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Nanoindentation Nanocomposites 0104 chemical sciences Atomic layer deposition Tetragonal crystal system symbols.namesake Indentation :NATURAL SCIENCES:Physics [Research Subject Categories]symbols General Materials Science Composite material Thin film 0210 nano-technology Layer (electronics)

description

This work was funded by the European Regional Development Fund project TK134 “Emerging orders in quantum and nanomaterials”, Estonian Research Agency project PRG4 “Emerging novel phases in strongly frustrated quantum magnets”.

year	journal	country	edition	language
2020-01-01	Materials Chemistry and Physics

10.1016/j.matchemphys.2019.122270 http://dx.doi.org/10.1016/j.matchemphys.2019.122270

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