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RESEARCH PRODUCT

ALD thin ZnO layer as an active medium in a fiber-optic Fabry–Perot interferometer

Paweł WierzbaRoman ViterRoman ViterPhilippe MieleMikhael BechelanyAdam MazikowskiMałgorzata Jędrzejewska-szczerskaA. Abou ChaayaKatarzyna KarpienkoMaciej S. Wróbel

subject

Materials science02 engineering and technology01 natural sciencesTemperature measurementAtomic layer depositionOptics0103 physical sciences[CHIM]Chemical SciencesFiberElectrical and Electronic EngineeringInstrumentationComputingMilieux_MISCELLANEOUS010302 applied physicsbusiness.industryMetals and AlloysAtmospheric temperature range021001 nanoscience & nanotechnologyCondensed Matter PhysicsSurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsInterferometryFiber optic sensor0210 nano-technologybusinessLayer (electronics)Fabry–Pérot interferometer

description

Abstract A novel optical fiber sensor of temperature using a thin ZnO layer fabricated by atomic layer deposition (ALD) is demonstrated for the first time. The thin ZnO layer was grown on the face of a standard optical telecommunication fiber SMF-28 and operates as a Fabry–Perot interferometer sensitive to temperature. The interferometer characterization was made in the temperature range extending from 50 to 300 °C with resolution equal to 1 °C. The output signal was analyzed by measurement of the shift of the maxima in spectral pattern. The sensitivity of temperature measurement is about 0.05 nm/°C. Furthermore, very good linearity of the sensor was achieved with correlation coefficient R2 = 0.9984.

10.1016/j.sna.2014.11.001https://hal.umontpellier.fr/hal-01684769