6533b828fe1ef96bd12881e8
RESEARCH PRODUCT
Structural characterization of TiNxOy/TiO2 single crystalline and nanometric multilayers grown by LP-MOCVD on (110)TiO2
M.c. Marco De LucasM. SacilottiJérôme GuillotP. SibillotSylvie BourgeoisLuc ImhoffR MarconF. FabreguetteLisandro Pavie CardosoP. Dufoursubject
DiffractionMaterials scienceSuperlatticeMetals and AlloysAnalytical chemistryMineralogySurfaces and InterfacesEpitaxySurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsCharacterization (materials science)Transmission electron microscopyRutileMaterials ChemistryMetalorganic vapour phase epitaxyDeposition (law)description
TiO2/TiNxOy superlattices were grown by Low Pressure-Metal-Organic Vapor Phase Epitaxy (LP-MOVPE) technique at deposition temperatures ranking from 650 to 750°C. The growth was performed on top of TiO2(110) rutile substrates. Intense peaks observed in the X-rays rocking curves and θ-2θ diffraction patterns show the presence of crystalline epilayers. The TiNxOy layers were grown in a (200) cubic structure on the (110) quadratic TiO2 epilayer structure. Transmission electron microscopy confirmed the XRD results and showed the formation of periodic and well structured epilayers.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2001-12-01 | Thin Solid Films |