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RESEARCH PRODUCT
Proton implanted waveguides in LiNbO3, KNbO3and BaTiO3
H. HesseK. WirlG. GodefroyP. HertelE. KrätzigP. ThevenardP. Morettisubject
Materials scienceProtonbusiness.industryProton implantationPhysics::OpticsCondensed Matter PhysicsElectronic Optical and Magnetic Materialslaw.inventionIonCondensed Matter::Materials SciencePlanarOpticslawVan de Graaff generatorAtomic physicsDark lineSpectroscopybusinessWaveguidedescription
Abstract By using a Van De Graaf accelerator, planar waveguides in LiNbO3, KNbO3, and BaTiO3 are fabricated (at 300 K) by thermally controlled proton implantation. The waveguide properties are investigated by dark line mode spectroscopy. The reconstructed profiles closely follow the ion concentration profiles as determined by simulation (TRIM).
| year | journal | country | edition | language |
|---|---|---|---|---|
| 1992-04-01 | Ferroelectrics |