6533b834fe1ef96bd129d885
RESEARCH PRODUCT
Ru-Based Thin Film Temperature Sensor for Space Environments: Microfabrication and Characterization under Total Ionizing Dose
Susana CardosoD. Ramírez MuñozPaulo P. FreitasS. I. Ravelo Ariassubject
Materials scienceArticle SubjectAnnealing (metallurgy)Analytical chemistry02 engineering and technologyRadiation021001 nanoscience & nanotechnology01 natural sciences010309 opticsControl and Systems EngineeringAbsorbed doselcsh:Technology (General)0103 physical scienceslcsh:T1-995Resistance thermometerIrradiationElectrical and Electronic EngineeringThin film0210 nano-technologyDose rateInstrumentationMicrofabricationdescription
The paper shows the microfabrication processes of a Ruthenium-based resistance temperature detector and its behavior in response to irradiation at ambient temperature. The radiation test was done in a public hospital facility and followed the procedures based on the ESA specification ESCC 22900. The instrumentation system used for the test is detailed in the work describing the sensors resistance evolution before, during, and after the exposure. A total irradiation dose of 43 krad with 36 krad/h dose rate was applied and a subsequent characterization was performed once the Ru sensors were submitted to an 80°C annealing process during a period of 168 h. The experimental measurements have shown the stability of this sensor against total ionizing dose (TID) tests, not only in their resistance absolute values during the irradiation phase but also in the relative deviation from their values before irradiation.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2016-01-01 | Journal of Sensors |