Silicon nitride-based deep sub-λ slit for ultra-broadband THz coherent detection

6533b83afe1ef96bd12a7a70

RESEARCH PRODUCT

Silicon nitride-based deep sub-λ slit for ultra-broadband THz coherent detection

Alessandro Tomasino Marco Peccianti Mohamed Chaker Yoann Jestin Riccardo Piccoli Luca Razzari Alessandro Busacca Sebastien Delprat Matteo Clerici Roberto Morandotti

subject

Materials science Silicon business.industry Terahertz radiation Terahertz chemistry.chemical_element Nonlinear optics Settore ING-INF/01 - Elettronica 01 natural sciences Terahertz spectroscopy and technology coherent detection 010309 optics chemistry.chemical_compound silicon nitride chemistry Silicon nitride 0103 physical sciences Broadband Optoelectronics Heterodyne detection Thin film 010306 general physics business

description

We report on the characterization of a new type of CMOS-compatible device for terahertz solid-state biased coherent detection, which relies on a 1-µm-wide metallic slit embedded in a thin film of PECVD-grown silicon nitride.

year	journal	country	edition	language
2018-01-01

http://www.scopus.com/inward/record.url?eid=2-s2.0-85052580542&partnerID=MN8TOARS

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