6533b859fe1ef96bd12b7607
RESEARCH PRODUCT
Economical device for measuring thickness of a thin polymer film
Jukka P. PekolaK. HirviM. PaalanenTapio Mäkeläsubject
chemistry.chemical_classificationMaterials sciencebusiness.industryPolymerSubstrate (electronics)Semiconductor laser theoryOptical reflectionWavelengthCarbon filmchemistryHomogeneousOptoelectronicsThin filmbusinessInstrumentationdescription
An inexpensive device (about $2K) for thickness measurements of thin (<1 μm) polymer films has been constructed. The homogeneous film is placed on a bulk substrate and three semiconductor lasers of different wavelengths are used to measure the reflectances at normal incidence. The thickness can be deduced with typically 4–8 nm uncertainty.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 1994-08-01 | Review of Scientific Instruments |