6533b861fe1ef96bd12c501e
RESEARCH PRODUCT
On the use of grazing-incidence small-angle X-ray scattering (GISAXS) in the morphological study of ion-implanted materials.
Elti CattaruzzaAntonino MartoranaAlessandro LongoFrancesco GonellaGiovanni MatteiFrancesco D'acapitoClaudia MondelliChiara Mauriziosubject
Nuclear and High Energy PhysicsRadiationAmorphous metalMaterials sciencebusiness.industryScatteringSmall-angle X-ray scatteringSynchrotron radiationSmall-angle neutron scatteringIonOpticsIon implantationGrazing-incidence small-angle scatteringIon implantation Surface plasmon resonance third-order opticalbusinessInstrumentationdescription
Grazing-incidence small-angle X-ray scattering has become a widely used technique for the morphological analysis of surface systems. Here it is show how this technique can be applied to a buried system, like metallic clusters in glass obtained by ion implantation. The optimization of the data-collection geometry is described as well as the details of the quantitative data analysis. An experimental example on Cu + Au-implanted glasses shows the potentiality of the technique.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2004-01-01 | Journal of synchrotron radiation |