Properties of atomic layer deposited nanolaminates of zirconium and cobalt oxides

6533b862fe1ef96bd12c63c0

RESEARCH PRODUCT

Properties of atomic layer deposited nanolaminates of zirconium and cobalt oxides

Mihkel Rähn Joosep Link Helina Seemen Helena Castán Raivo Stern Timo Sajavaara Kaupo Kukli Aile Tamm Salvador Dueñas Kristjan Kalam

subject

Materials science Silicon 116 Chemical sciences ta221 chemistry.chemical_element 02 engineering and technology Dielectric Chemical vapor deposition 7. Clean energy 01 natural sciences Spray pyrolysis Thermal barrier coating Óxidos metálicos SPRAY-PYROLYSIS DIELECTRICS nanorakenteet magnetoelectrics 0103 physical sciences Nanolaminates nanolaminates SILICON 010302 applied physics Zirconium ta114 ZRO2 THIN-FILMS CO3O4 FILMS BUFFER LAYER atomikerroskasvatus 021001 nanoscience & nanotechnology Electronic Optical and Magnetic Materials THERMAL BARRIER COATINGS CHEMICAL-VAPOR-DEPOSITION chemistry Chemical engineering LASER DEPOSITION Nanoláminas atomic layer deposition Metal oxides 221 Nano-technology ohutkalvot 0210 nano-technology Layer (electronics)Cobalt GAS SENSORS

description

Producción Científica

year	journal	country	edition	language
2018-07-28

10.1149/2.0191808jss http://uvadoc.uva.es/handle/10324/44656

PEPhysical Sciences and Engineering
- PE2Fundamental Constituents of Matter
  - PE2_1Theory of fundamental interactions
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  - PE2_10Atomic, molecular physics
  - PE2_11Ultra-cold atoms and molecules
  - PE2_18Equilibrium and non-equilibrium statistical mechanics: steady states and dynamics
  - PE2_14Lasers, ultra-short lasers and laser physics
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  - PE2_12Optics, non-linear optics and nano-optics
  - PE2_13Quantum optics and quantum information
  - PE2_15Thermodynamics
- PE1Mathematics
  - PE1_1Logic and foundations
  - PE1_6Geometry and global analysis
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  - PE1_9Operator algebras and functional analysis
  - PE1_10ODE and dynamical systems
  - PE1_12Mathematical physics
  - PE1_11Theoretical aspects of partial differential equations
  - PE1_13Probability
  - PE1_14Mathematical statistics
  - PE1_15Generic statistical methodology and modelling
  - PE1_4 Algebraic and complex geometry
  - PE1_19Scientific computing and data processing
  - PE1_2Algebra
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  - PE1_21Application of mathematics in sciences
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  - PE1_5Lie groups, Lie algebras
  - PE1_18Numerical analysis
  - PE1_16Discrete mathematics and combinatorics
  - PE1_17Mathematical aspects of computer science
  - PE1_3Number theory
- PE3Condensed Matter Physics
  - PE3_1Structure of solids, material growth and characterisation
  - PE3_2Mechanical and acoustical properties of condensed matter, lattice dynamics
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  - PE3_4Electronic properties of materials, surfaces, interfaces, nanostructures
  - PE3_6Macroscopic quantum phenomena, e.g. superconductivity, superfluidity, quantum Hall effect
  - PE3_5Physical properties of semiconductors and insulators
  - PE3_8Magnetism and strongly correlated systems
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  - PE6_1Computer architecture, embedded systems, operating systems
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  - PE6_11Machine learning, statistical data processing and applications using signal processing (e.g. speech, image, video)
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  - PE6_8Computer graphics, computer vision, multimedia, computer games
- PE7Systems and Communication Engineering
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  - PE10_13Physical geography, geomorphology
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- PE11Materials Engineering
  - PE11_2Engineering of metals and alloys
  - PE11_1Engineering of biomaterials, biomimetic, bioinspired and bio-enabled materials
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  - PE11_6Engineering of carbon materials
  - PE11_7Engineering of metal oxides
  - PE11_8Engineering of alternative established or emergent materials
  - PE11_9Nanomaterials engineering, e.g. nanoparticles, nanoporous materials, 1D & 2D nanomaterials
  - PE11_10Soft materials engineering, e.g. gels, foams, colloids
  - PE11_11Porous materials engineering, e.g. covalent-organic, metal-organic, porous aromatic frameworks
  - PE11_12Semi-conducting and magnetic materials engineering
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  - PE11_14Computational methods for materials engineering
LSLife Sciences
- LS1Molecules of Life: Biological Mechanisms, Structures and Functions
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