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RESEARCH PRODUCT
Mechanical properties of aluminum, zirconium, hafnium and tantalum oxides and their nanolaminates grown by atomic layer deposition
Maido MerisaluMarkku LeskeläAile TammMikko HeikkiläMikko RitalaIrina HussainovaHugo MändarKaupo KukliKaupo KukliTaivo JõgiaasR. Zabelssubject
ZirconiumMaterials scienceMetallurgyTantalumOxidechemistry.chemical_elementSurfaces and InterfacesGeneral ChemistrySubstrate (electronics)Condensed Matter PhysicsSurfaces Coatings and FilmsAmorphous solidAtomic layer depositionchemistry.chemical_compoundchemistryAluminiumMaterials ChemistryComposite materialThin filmdescription
ABSTRACT The mechanical properties of two different metal oxide nanolaminates comprised of Ta 2 O 5 and Al 2 O 3 , HfO 2 or ZrO 2 , grown on soda–lime glass substrate by atomic layer deposition, were investigated. Ta 2 O 5 and Al 2 O 3 layers were amorphous, whereas ZrO 2 and HfO 2 possessed crystalline structure. Thickness of single oxide layers was varied between 2.5 and 15 nm. The total thickness of the laminate structures was in the range of 160–170 nm. The hardness values of single layer oxides on glass ranged from 6.7 GPa (Ta 2 O 5 ) to 9.5 GPa (Al 2 O 3 ). Corresponding elastic moduli were 96 GPa and 101 GPa. The hardnesses of laminates were in the range of 6.8–7.8 GPa and elastic moduli were between 93 and 118 GPa. The results implied a correlation between mechanical properties and the relative content of constituent single oxides.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2015-11-01 | Surface and Coatings Technology |