6533b874fe1ef96bd12d60bd
RESEARCH PRODUCT
PATTERNED LASER CRYSTALLIZATION OF a-Si
V. KlykovG. MarcinsBoris PolyakovI. TaleMikhail ChubarovAlexei Kuzminsubject
Materials sciencebusiness.industryOrders of magnitude (temperature)General EngineeringGeneral Physics and AstronomyLaserAmorphous solidlaw.inventionlawElectrical resistivity and conductivityPicosecondLaser crystallizationOptoelectronicsThin filmbusinessLaser beamsdescription
PATTERNED LASER CRYSTALLIZATION OF a-SiThin films of amorphous Si on glass were crystallized by pulsed nano- and picosecond lasers. Two methods for creating the desired patterns of crystallized regions were used. In the former, the pattern is produced by a focused laser beam, and in the latter it is made using a prefabricated mask. The electric conductivity of crystallized films increases by more than 4 orders of magnitude in comparison with untreated amorphous films.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2009-01-01 | Latvian Journal of Physics and Technical Sciences |