Search results for "Elastic recoil"

Time-of-flight telescope for heavy-ion RBS

2007

Abstract This paper describes a time-of-flight (TOF) spectrometer for Heavy-Ion Rutherford Backscattering Spectrometry (HI-RBS) recently installed at IMEC for thin film analysis. The TOF telescope allows the use of ion beams heavier than He, with advantages in terms of depth and mass resolution and sensitivity compared to conventional RBS based on planar Si detectors. The start timing-signal is produced by the secondary electrons emitted from a thin C foil when traversed by a backscattered ion; the electrons are deflected in an electrostatic mirror towards a Micro-channel plate (MCP) assembly which provides a fast timing response. The stop signal is obtained directly from a second MCP assem…

Ion source and low energy beam transport prototyping for a single-ended heavy ion ToF-ERDA facility

2023

We present the status of the ion source and low energy beam transport prototyping activities for a heavy ion time-of-flight elastic recoil detection analysis (ToF-ERDA) equipment, designed to accelerate a flux of 1–10 particle nano-Ampere of 40Ar6-12+ ions to 3–6 MeV energy for depth profiling of light elements. The prototype injector consists of a novel permanent magnet electron cyclotron resonance ion source CUBE-ECRIS with a minimum-B quadrupole field topology, and a 90° permanent magnet dipole with adjustable field strength for charge state selection. We report experimentally measured argon beam currents as a function of the applied microwave power and ion source potential to demonstrat…

Secondary electron flight times and tracks in the carbon foil time pick-up detector

2014

Carbon foil time pick-up detectors used in the time-of-flight measurements of MeV energy ions have been studied in connection to time-of-flight-energy spectrometer used for heavy ion elastic recoil detection analysis. In experimental coincident TOF-E data characteristic halos are observed around light element isobars, and the origin of these halos were studied. The experimental data indicated that these halos originate from single electron events occurring before the electron multiplication in the microchannel plate. By means of electron trajectory simulations, this halo effect is explained to originate from single electron, emitted from the carbon foil, hitting the non-active area of the m…

Studies on atomic layer deposition of IRMOF-8 thin films

2015

Deposition of IRMOF-8 thin films by atomic layer deposition was studied at 260–320 C. Zinc acetate and 2,6-naphthalenedicarboxylic acid were used as the precursors. The as-deposited amorphous films were crystallized in 70% relative humidity at room temperature resulting in an unknown phase with a large unit cell. An autoclave with dimethylformamide as the solvent was used to recrystallize the films into IRMOF-8 as confirmed by grazing incidence x-ray diffraction. The films were further characterized by high temperature x-ray diffraction (HTXRD), field emission scanning electron microscopy, Fourier transform infrared spectroscopy (FTIR), time-of-flight elastic recoil detection analysis (TOF-…

Determination of molecular stopping cross section of 12C, 16O, 28Si, 35Cl, 58Ni, 79Br, and 127I in silicon nitride

2015

Abstract Silicon nitride is a technologically important material in a range of applications due to a combination of important properties. Ion beam analysis techniques, and in particular, heavy ion elastic recoil detection analysis can be used to determine the stoichiometry of silicon nitride films, which often deviates from the ideal Si3N4, as well as the content of impurities such as hydrogen, even in the presence of other materials or in a matrix containing heavier elements. Accurate quantification of IBA results depends on the basic data used in the data analysis. Quantitative depth profiling relies on the knowledge of the stopping power cross sections of the materials studied for the io…

Depth profiling of Al2O3 + TiO2 nanolaminates by means of a time-of-flight energy spectrometer

2011

Atomic layer deposition (ALD) is currently a widespread method to grow conformal thin films with a sub-nm thickness control. By using ALD for nanolaminate oxides, it is possible to fine tune the electrical, optical and mechanical properties of thin films. In this study the elemental depth profiles and surface roughnesses were determined for Al2O3 + TiO2 nanolaminates with nominal single-layer thicknesses of 1, 2, 5, 10 and 20 nm and total thickness between 40 nm and 60 nm. The depth profiles were measured by means of a time-of-flight elastic recoil detection analysis (ToF-ERDA) spectrometer recently installed at the University of Jyväskylä. In TOF-E measurements 63Cu, 35Cl, 12C and 4He ions…

Time-of-flight - Energy spectrometer for elemental depth profiling - Jyväskylä design

2014

Abstract A new time-of-flight elastic recoil detection spectrometer has been built, and initially the main effort was focused in getting good timing resolution and high detection efficiency for light elements. With the ready system, a 154 ps timing resolution was recorded for scattered 4.8 MeV 4 He 2+ ions. The hydrogen detection efficiency was from 80% to 20% for energies from 100 keV to 1 MeV, respectively, and this was achieved by having an additional atomic layer deposited Al 2 O 3 coating on the first timing detector’s carbon foil. The data acquisition system utilizes an FPGA-card to time-stamp every time-of-flight and energy event with 25 ns resolution. The different origins of the ba…

Improvement of time-of-flight spectrometer for elastic recoil detection analysis

2013

Instrumentation for time-of-flight elastic recoil detection analysis

2016

Time-of-flight elastic recoil detection is an ion beam based method to analyze the elemental composition of thin film samples at different depths. In order to improve the mass resolution and to enable kinematic correction a position sensitive gas ionization chamber energy detector was constructed. This detector along with pre-existing timing detectors were connected to a modern fully digitizing data acquisition setup. This thesis describes the design of these instruments, including all aspects from the mechanical design of the gas ionization detector to the algorithm and software development of the digitizing acquisition setup. The performance of the system has been studied with measurements …

Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films

2018

A comparative study of mechanical properties and elemental and structural composition was made for aluminum nitride thin films deposited with reactive magnetron sputtering and plasma enhanced atomic layer deposition (PEALD). The sputtered films were deposited on Si (100), Mo (110), and Al (111) oriented substrates to study the effect of substrate texture on film properties. For the PEALD trimethylaluminum–ammonia films, the effects of process parameters, such as temperature, bias voltage, and plasma gas (ammonia versus N2/H2), on the AlN properties were studied. All the AlN films had a nominal thickness of 100 nm. Time-of-flight elastic recoil detection analysis showed the sputtered films t…