Search results for "deposition"

showing 10 items of 1324 documents

Review article: recommended reading list of early publications on atomic layer deposition - outcome of the "virtual Project on the History of ALD"

2017

Atomic layer deposition (ALD), a gas-phase thin film deposition technique based on repeated, self-terminating gas-solid reactions, has become the method of choice in semiconductor manufacturing and many other technological areas for depositing thin conformal inorganic material layers for various applications. ALD has been discovered and developed independently, at least twice, under different names: atomic layer epitaxy (ALE) and molecular layering. ALE, dating back to 1974 in Finland, has been commonly known as the origin of ALD, while work done since the 1960s in the Soviet Union under the name "molecular layering" (and sometimes other names) has remained much less known. The virtual proj…

semiconductor manufacturingThin filmsPatent literature2015 Nano TechnologyHOL - HolstLibrary scienceNanotechnology02 engineering and technologydeposition01 natural sciencesPoster presentationsAtomic layer deposition0103 physical sciencesAtomic layer epitaxy[CHIM]Chemical SciencesReading listPatentsComputingMilieux_MISCELLANEOUSgas-solid reaction010302 applied physicsTS - Technical SciencesIndustrial Innovationinorganic materialPhysicsAtomic layer depositionSilicaSurfaces and InterfacesatomikerroskasvatusAtomic layer021001 nanoscience & nanotechnologyCondensed Matter Physicshistory of technologySurfaces Coatings and FilmsALD0210 nano-technologySoviet unionAtomic layer epitaxial growthEpitaxyJournal of Vacuum Science and Technology A
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Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”

2017

semiconductor manufacturingta114ta213ta221atomic layer depositionta116history of technologyJournal of Vacuum Science and Technology A
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Effect of the Si doping on the properties of AZO/SiC/Si heterojunctions grown by low temperature pulsed laser deposition

2020

Abstract The structural and photoelectrical properties of Al-doped ZnO (AZO)/SiC/p-Si and AZO/SiC/n-Si heterojunctions, fabricated at low temperature by pulsed laser deposition, were investigated by means of a number of techniques. Raman analysis indicates that SiC layers have the cubic 3C-SiC phase, whilst X-ray diffraction measurements show that AZO films exhibit a hexagonal wurtzite structure, highly textured along the c-axis, with average crystallites size of 35.1 nm and lattice parameter c of 0.518 nm. The homogeneous and dense surface morphology observed by scanning electron microscopy was confirmed by atomic force microscopy images. Moreover, UV–Vis-NIR spectra indicated a high trans…

silicon carbide zinc oxide AZO heterojunction pulsed laser depositionMaterials sciencebusiness.industryDopingHeterojunctionCondensed Matter PhysicsSettore ING-INF/01 - ElettronicaElectronic Optical and Magnetic MaterialsPulsed laser depositionSettore ING-IND/22 - Scienza E Tecnologia Dei MaterialiMaterials ChemistryOptoelectronicsElectrical and Electronic EngineeringbusinessSemiconductor Science and Technology
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Low-temperature thermal and plasma-enhanced atomic layer deposition of metal oxide thin films

2017

Atomic layer deposition (ALD) is a method for thin film fabrication with atomic level precision. This thesis focuses on low-temperature thermal and plasma- enhanced ALD and presents results on thin film growth by these techniques with examples of common ALD materials: Al2O3, ZnO and TiO2. As an example of limitations of the thermal ALD the nucleation and growth of Al2O3 and ZnO films on different grades of poly(methyl methacrylate) (PMMA) are presented, showing that the initiation of the growth is strongly dependent on both the deposited material and the substrate. A potential application of the ALD ZnO films in polymer surface functionalization is demonstrated by changing in the surface wettab…

sinkkioksidiatomic layer depositionzinc oxideplasmatekniikkaatomikerroskasvatusohutkalvotpolymeeritplasma-enhanced atomic layer depositionpolymers
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Implication of pyoverdines in the interactions of fluorescent pseudomonads with soil microflora and plant in the rhizosphere

2008

International audience

soil microflorarelation sol plante atmosphereplant root[SDV.BDD] Life Sciences [q-bio]/Development Biologyrhizodeposition[SDV.BDD]Life Sciences [q-bio]/Development Biologyorganic compoundsComputingMilieux_MISCELLANEOUSmicrobial grouwth
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NANOWIRES AND THIN FILMS OF CIS/CIGS OBTAINED BY ELECTRODEPOSITION AS ABSORBER FOR SOLAR CELLS

2011

solar cellanodic alumina membranesSettore ING-IND/23 - Chimica Fisica Applicatathin filmnanowiretemplate synthesielectrodepositionsemiconductor
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Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering

2020

The suitability of Ti as a band gap modifier for &alpha

solar-blind detectionlaajakaistaiset puolijohteetalloyingBand gaplcsh:Mechanical engineering and machineryAnalytical chemistryCorundum02 engineering and technologyengineering.material7. Clean energy01 natural sciencesArticlegallium oxideCrystallinityAtomic layer depositionpuolijohteet0103 physical scienceslcsh:TJ1-1570Electrical and Electronic EngineeringThin filmQCgallium010302 applied physicsCondensed Matter - Materials Sciencewide band gap semiconductorsMechanical EngineeringWide-bandgap semiconductorPhysics - Applied Physicsatomikerroskasvatus021001 nanoscience & nanotechnologybandgapAmorphous solidthin filmstitaaniControl and Systems Engineeringatomic layer depositiongalliumoksidiengineeringSapphireohutkalvotddc:6200210 nano-technology
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Characterization of rhenium oxide films and their application to liquid crystal cells

2009

Rhenium trioxide exhibits high electronic conductivity, while its open cubic crystal structure allows an appreciable hydrogen intercalation, generating disordered solid phases, with protonic conductivity. Rhenium oxide thin films have been obtained by thermal evaporation of ReO3 powders on different substrates, maintained at different temperatures, and also by reactive magnetron sputtering of a Re metallic target. A comparative investigation has been carried out on these films, by using micro-Raman spectroscopy and x-ray diffraction. Two basic types of solid phases appear to grow in the films: a red metallic HxReO3 compound, with distorted perovskite structures, like in the bulk material, a…

structural and vibrational characterizationMaterials sciencePerrhenateInorganic chemistryGeneral Physics and Astronomychemistry.chemical_elementCrystal structureSputter depositionRheniumIndium tin oxidechemistry.chemical_compoundRhenium trioxidechemistryChemical engineeringLiquid crystalRhenium oxide filmsRhenium oxide films; structural and vibrational characterization; electro-optic response.electro-optic responsePerovskite (structure)Journal of Applied Physics
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Tuning of Emission Wavelength of CaS:Eu by Addition of Oxygen Using Atomic Layer Deposition

2021

| openaire: EC/H2020/820423/EU//S2QUIP | openaire: EC/H2020/834742/EU//ATOP | openaire: EC/H2020/965124/EU//FEMTOCHIP Atomic layer deposition (ALD) technology has unlocked new ways of manipulating the growth of inorganic materials. The fine control at the atomic level allowed by ALD technology creates the perfect conditions for the inclusion of new cationic or anionic elements of the already-known materials. Consequently, novel material characteristics may arise with new functions for applications. This is especially relevant for inorganic luminescent materials where slight changes in the vicinity of the luminescent centers may originate new emission properties. Here, we studied the lumines…

sulfiditkalsiumTechnologyMicroscopyQC120-168.85Eu [CaS]TQH201-278.5CaS:Eu; phosphor; photoluminescence; atomic layer depositionatomikerroskasvatusharvinaiset maametallitEngineering (General). Civil engineering (General)ArticlephosphorTK1-9971Descriptive and experimental mechanicsatomic layer depositionCaS:EuphotoluminescenceElectrical engineering. Electronics. Nuclear engineeringohutkalvotTA1-2040fotoluminesenssifosforiMaterials
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Normal-Metal–Insulator–Superconductor Tunnel Junction With Atomic-Layer-Deposited Titanium Nitride as Superconductor

2015

suprajohtavuusta114thermometrythin filmsuperconductivityta22102 engineering and technologyatomikerroskasvatus021001 nanoscience & nanotechnologyCondensed Matter Physics01 natural sciencesElectronic Optical and Magnetic Materialstunnel junctionspseudogapatomic layer deposition0103 physical sciencesElectrical and Electronic Engineering010306 general physics0210 nano-technologyta116IEEE Transactions on Applied Superconductivity
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