Search results for "sputter deposition"
showing 10 items of 93 documents
Growth and composition of nanostructured and nanoporous cerium oxide thin films on a graphite foil.
2015
The morphology and composition of CeOx films prepared by r.f. magnetron sputtering on a graphite foil have been investigated mainly by using microscopy methods. This study presents the formation of nanocrystalline layers with porous structure due to the modification of a carbon support and the formation of cerium carbide crystallites as a result of the deposition process. Chemical analyses of the layers with different thicknesses performed by energy dispersive X-ray spectroscopy, electron energy loss spectroscopy and X-ray photoelectron spectroscopy have pointed to the reduction of the cerium oxide layers. In the deposited layers, cerium was present in mixed Ce(3+) and Ce(4+) valence. Ce(3+…
Pt–CeO thin film catalysts for PEMFC
2015
Abstract Platinum is the mostly used element in catalysts for fuel cell technology, but its high price limits large-scale applications. Platinum doped cerium oxide represents an alternative solution due to very low loading, typically few micrograms per 1 cm2, at the proton exchange membrane fuel cell (PEMFC) anode. High efficiency is achieved by using magnetron sputtering deposition of cerium oxide and Pt of 30 nm thick nanoporous films on large surface carbon nanoparticle substrates. Thin film techniques permits to grow the catalyst film characterized by highly dispersed platinum, mostly in ionic Pt2+ state. Such dispersed Pt species show high activity and stability. These new materials ma…
Proton exchange membrane fuel cell made of magnetron sputtered Pt–CeO and Pt–Co thin film catalysts
2015
Abstract Preparation of catalysts for proton exchange membrane fuel cells (PEMFCs) is of growing interest during last years. The magnetron sputtering technique is a promising method of catalyst preparation because it permits to synthesize catalysts in a fast and relatively less expensive way, however control of specific surface and durability of such catalysts still remains the main concern. We tested a single cell PEMFC catalyzed by using exclusively thin film approach by combining state-of-the art Pt-doped cerium oxide anode and a new Pt–Co alloy cathode. We have shown that beside very high mass activity of the catalysts relative to the membrane electrode assembly the catalyst nanoporous …
Preparation of magnetron sputtered thin cerium oxide films with a large surface on silicon substrates using carbonaceous interlayers.
2013
The study focuses on preparation of thin cerium oxide films with a porous structure prepared by rf magnetron sputtering on a silicon wafer substrate using amorphous carbon (a-C) and nitrogenated amorphous carbon films (CNx) as an interlayer. We show that the structure and morphology of the deposited layers depend on the oxygen concentration in working gas used for cerium oxide deposition. Considerable erosion of the carbonaceous interlayer accompanied by the formation of highly porous carbon/cerium oxide bilayer systems is reported. Etching of the carbon interlayer with oxygen species occurring simultaneously with cerium oxide film growth is considered to be the driving force for this effec…
Electronic properties of Co2FeSi investigated by X-ray magnetic linear dichroism
2014
We present experimental XMLD spectra measured on epitaxial (001)-oriented thin Co$_{2}$FeSi films, which are rich in features and depend sensitively on the degree of atomic order and interdiffusion from capping layers. Al- and Cr-capped films with different degrees of atomic order were prepared by DC magnetron sputtering by varying the deposition temperatures. The local structural properties of the film samples were additionally investigated by nuclear magnetic resonance (NMR) measurements. The XMLD spectra of the different samples show clear and uniform trends at the $L_{3,2}$ edges. The Al-capped samples show similar behavior as previous measured XMLD spectra of Co$_2$FeSi$_{0.6}$Al$_{0.4…
Epitaxy of thin films of the Heusler compound
2007
Abstract Epitaxial thin films of the highly spin polarized Heusler compound Co 2 Cr 0.6 Fe 0.4 Al are deposited by DC magnetron sputtering. It is shown by XRD and TEM investigations how the use of an Fe buffer layer on MgO(1 0 0) substrates supports the growth of highly ordered Co 2 Cr 0.6 Fe 0.4 Al at low deposition temperatures. The as-grown samples show a relatively large ordered magnetic moment of μ ≃ 3.0 μ B / f . u . providing evidence for a low level of disorder.
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1997
The fundamental absorption edge of amorphous, polycrystalline and crystalline tungsten trioxide (WO3) thin films obtained by different techniques (thermal evaporation, rf plasma sputtering, chemical gas transport) was investigated. Special attention was paid to correct measurements of absorption values of all WO3 thin films taking into account the scattered light, interference effects and reflection losses. The indirect edge at 2.70 eV was determined for crystalline WO3, but for crystal WO3:Ti the direct edge in the same place (2.72 eV) was found. For polycrystalline WO3 thin film first edge transition located at 2.76 eV had a quadratic dependence similar to the amorphous film at a higher p…
Structure and Microscopic Magnetism of Epitaxial Ni-Mn-Ga Films
2012
We report on the structural and magnetic properties of epitaxial thin films of the ferromagnetic shape memory material Ni–Mn–Ga prepared by DC magnetron sputter deposition. Different substrate materials, i.e., MgO(100) and Al2O3(11−20) allow for a tailored epitaxial growth. Using a sacrificial chromium buffer layer freestanding epitaxial films are obtained. In combination with photolithography partially freestanding structures such as microbridges are fabricated. The complex martensite crystal structure in substrate-constrained and freestanding films is studied by means of X-ray diffraction. The identified asymmetric twin variant configuration is associated with a macroscopic surface patter…
Structure determination of thin CoFe films by anomalous x-ray diffraction
2012
This work reports on the investigation of structure-property relationships in thin CoFe films grown on MgO. Because of the very similar scattering factors of Fe and Co, it is not possible to distinguish the random A2 (W-type) structure from the ordered B2 (CsCl-type) structure with commonly used x-ray sources. Synchrotron radiation based anomalous x-ray diffraction overcomes this problem. It is shown that as grown thin films and 300 K post annealed films exhibit the A2 structure with a random distribution of Co and Fe. In contrast, films annealed at 400 K adopt the ordered B2 structure.
A comparative study of heterostructured CuO/CuWO4 nanowires and thin films
2017
Authors are grateful to Reinis Ignatans for XRD measurements.