0000000000038455

AUTHOR

Monia Spera

showing 7 related works from this author

Effect of high temperature annealing (T > 1650 °C) on the morphological and electrical properties of p-type implanted 4H-SiC layers

2019

This work reports on the effect of high temperature annealing on the electrical properties of p-type implanted 4H-SiC. Ion implantations of Aluminum (Al) at different energies (30-200 keV) were carried out to achieve 300 nm thick acceptor box profiles with a concentration of about 10(20) at/cm(3). The implanted samples were annealed at high temperatures (1675-1825 degrees C). Morphological analyses of the annealed samples revealed only a slight increase of the surface roughness RMS up to 1775 degrees C, while this increase becomes more significant at 1825 degrees C (RMS = 1.2 nm). Room temperature Hall measurements resulted in a hole concentration in the range 0.65-1.34 x 10(18)/cm(3) and m…

4H-SiCMaterials scienceFabricationAnnealing (metallurgy)Analytical chemistrychemistry.chemical_element02 engineering and technologyActivation energy01 natural sciencesIonAluminium0103 physical sciencesSurface roughnessGeneral Materials ScienceElectrical measurements010302 applied physicsCondensed Matter - Materials ScienceMechanical EngineeringPhysics - Applied Physics021001 nanoscience & nanotechnologyCondensed Matter PhysicsAcceptorPost implantation annealingchemistryMechanics of MaterialsElectrical activationp-type implantation0210 nano-technologyMaterials Science in Semiconductor Processing
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Barrier inhomogeneity in vertical Schottky diodes on free standing gallium nitride

2019

Abstract In this paper, the electrical behavior of a Ni/Au Schottky barrier on free standing GaN has been studied employing a variety of techniques and correlated with the material and interface quality. The temperature dependence of the ideality factor (n) and of the Schottky barrier height (ΦB) revealed a spatial inhomogeneity of the barrier. This behavior has been described by means of the Tung's model on inhomogeneous Schottky barriers. The origin of the barrier inhomogeneity can be likely associated to the surface quality of the GaN epilayer or to microstructure of the Ni/GaN interface.

010302 applied physicsMaterials scienceCondensed matter physicsMechanical EngineeringSchottky barrierSchottky diodeGallium nitride02 engineering and technology021001 nanoscience & nanotechnologyCondensed Matter PhysicsMicrostructure01 natural sciencesFree standing GaNchemistry.chemical_compoundQuality (physics)chemistryMechanics of MaterialsNi/GaN interface0103 physical sciencesGeneral Materials ScienceBarrier spatial inhomogeneity0210 nano-technologySchottky barrier
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Metal/Semiconductor Barrier Properties of Non-Recessed Ti/Al/Ti and Ta/Al/Ta Ohmic Contacts on AlGaN/GaN Heterostructures

2019

This paper compares the metal/semiconductor barrier height properties of non-recessed Ti/Al/Ti and Ta/Al/Ta contacts on AlGaN/GaN heterostructures. Both contacts exhibited a rectifying behavior after deposition and after annealing at temperatures up to 550 &deg

Control and OptimizationMaterials scienceAnnealing (metallurgy)Analytical chemistryEnergy Engineering and Power Technology02 engineering and technologylcsh:Technology01 natural sciencesCondensed Matter::Materials ScienceAlGaN/GaNTa/Al/TaTi/Al/Ti0103 physical sciencesElectrical and Electronic EngineeringEngineering (miscellaneous)Ohmic contact010302 applied physicslcsh:TBarrier heightRenewable Energy Sustainability and the Environmentbusiness.industryContact resistanceohmic contactsHeterojunctionConductive atomic force microscopyCondensed Matter::Mesoscopic Systems and Quantum Hall Effect021001 nanoscience & nanotechnologyMicrostructureOhmic contactSemiconductor0210 nano-technologybusinessEnergy (miscellaneous)HillockEnergies
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Ohmic contacts on n-type and p-type cubic silicon carbide (3C-SiC) grown on silicon

2019

This paper is a report on Ohmic contacts on n-type and p-type type cubic silicon carbide (3C-SiC) layers grown on silicon substrates. In particular, the morphological, electrical and structural properties of annealed Ni and Ti/Al/Ni contacts has been studied employing several characterization techniques. Ni films annealed at 950 degrees C form Ohmic contacts on moderately n-type doped 3C-SiC (N-D similar to 1 x 10(17) cm(-3)), with a specific contact resistance of 3.7 x 10(-3) Omega cm(2). The main phase formed upon annealing in this contact was nickel silicide (Ni2Si), with randomly dispersed carbon in the reacted layer. In the case of a p-type 3C-SiC with a high doping level (N-A similar …

Materials scienceSiliconAnnealing (metallurgy)Analytical chemistryFOS: Physical scienceschemistry.chemical_elementApplied Physics (physics.app-ph)02 engineering and technologyThermionic field emission01 natural sciencesNickel silicideTi/Al/Ni0103 physical sciencesGeneral Materials ScienceOhmic contact3C-SiCOhmic contacts010302 applied physicsMechanical EngineeringCubic silicon carbideDopingContact resistancePhysics - Applied Physics021001 nanoscience & nanotechnologyCondensed Matter PhysicsNi2SichemistryMechanics of Materials0210 nano-technologyMaterials Science in Semiconductor Processing
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Environment assisted photoconversion of luminescent surface defects in SiO 2 nanoparticles

2017

Abstract Time-resolved photoluminescence investigation on SiO 2 nanoparticles was carried out in controlled atmosphere, with the aim to discern the effects induced on the typical blue luminescence band by high power UV Nd:YAG laser photons (4.66 eV) and by some selected molecular species of the air (O 2 , N 2 , CO 2 , H 2 O). These factors ultimately determine both the brightness and photostability of the emitting defect, so as to limit the unique and attracting potentialities offered by this system in many applicative fields. Here it is highlighted that the effects due to photons and molecules, singularly considered, are not additive, the radiation being more dramatic in reducing the emiss…

Controlled atmospherePhotoluminescenceMaterials scienceGeneral Physics and AstronomyNanoparticleSiO2 nanoparticle02 engineering and technology010402 general chemistryPhotochemistry01 natural sciencesFluenceSurface defectlaw.inventionlawQuenchingSpectroscopyQuenchingbusiness.industryTime-resolved luminescenceSurfaces and InterfacesGeneral Chemistry021001 nanoscience & nanotechnologyCondensed Matter PhysicsLaser0104 chemical sciencesSurfaces Coatings and FilmsPhotostabilityBleachingOptoelectronics0210 nano-technologyLuminescencebusinessApplied Surface Science
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Modification of the sheet resistance under Ti/Al/Ni/Au Ohmic contacts on AlGaN/GaN heterostructures

2018

This paper reports on the modification of the sheet resistance under Ti/Al/Ni/Au Ohmic contacts on AlGaN/GaN heterostructures, studied by means of Transmission Line Model (TLM) structures, morphological and structural analyses, as well as computer simulations. In particular, the contacts exhibited an Ohmic behaviour after annealing at 800 degrees C, with a specific contact resistance rho(c) = (2.4 +/- 0.2) x 10(-5) Omega cm(2), which was associated to morphological and structural changes of both the metal layer and the interface. Interestingly, TLM analyses gave a value of the sheet resistance under the contact (R-SK = 26.1 +/- 5.0 Omega/rectangle) significantly lower than that measured out…

Materials scienceAnnealing (metallurgy)Algan gan02 engineering and technology01 natural sciencesMetal0103 physical sciencesAlGaN/GaN heterostructuresGeneral Materials ScienceComposite materialOhmic contactSheet resistanceOhmic contacts010302 applied physicsbusiness.industryMechanical EngineeringContact resistanceTransmission Line ModelHeterojunction021001 nanoscience & nanotechnologyCondensed Matter PhysicsSemiconductorMechanics of Materialsvisual_artvisual_art.visual_art_mediumTi/Al/Ni/Au0210 nano-technologybusiness
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Ohmic Contacts on p-Type Al-Implanted 4H-SiC Layers after Different Post-Implantation Annealings

2019

This paper reports on the electrical activation and Ohmic contact properties on p-type Al-implanted silicon carbide (4H-SiC). In particular, the contacts were formed on 4H-SiC-implanted layers, subjected to three different post-implantation annealing processes, at 1675 &deg

FabricationMaterials science4H-SiCAnnealing (metallurgy)02 engineering and technology01 natural scienceslcsh:TechnologyArticlechemistry.chemical_compound0103 physical sciencesSilicon carbideGeneral Materials ScienceComposite materiallcsh:MicroscopyOhmic contactlcsh:QC120-168.85010302 applied physicsion-implantationDopantlcsh:QH201-278.5lcsh:TContact resistanceohmic contacts021001 nanoscience & nanotechnologyAcceptor3. Good healthIon implantationchemistrylcsh:TA1-2040lcsh:Descriptive and experimental mechanicslcsh:Electrical engineering. Electronics. Nuclear engineering0210 nano-technologylcsh:Engineering (General). Civil engineering (General)lcsh:TK1-9971Materials
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