6533b7d3fe1ef96bd125fed0

RESEARCH PRODUCT

Ion implantation effects in BaTiO3 single crystals

P. MorettiF.r. SommerfeldP. ThevenardG. Godefroy

subject

Nuclear and High Energy PhysicsMaterials sciencebusiness.industryAnnealing (metallurgy)Physics::Opticschemistry.chemical_elementMolecular physicslaw.inventionIonOpticsIon implantationPlanarchemistrylawbusinessInstrumentationWaveguideRefractive indexHelium

description

Abstract Thermally controlled helium implantation has been used to produce planar waveguides in BaTiO3 without noticeable depoling effects in the samples. Profiles for the ordinary and extraordinary refractive index are deduced from optical mode measurements. No annealing procedure is required. We report the effects of different ion fluences and energies in the MeV range on the waveguide properties.

https://doi.org/10.1016/0168-583x(91)95799-j