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RESEARCH PRODUCT

Cathodoluminescence and structural studies of nitrided 3D gallium structures grown by MOCVD

M. SacilottiF. FabreguetteTh. ChiaramonteTh. ChiaramonteLisandro Pavie CardosoManuel J. Romero

subject

Materials scienceBiophysicsAnalytical chemistrychemistry.chemical_elementMineralogyCathodoluminescenceGallium nitrideGeneral ChemistryChemical vapor depositionNitrideCondensed Matter PhysicsBiochemistryAtomic and Molecular Physics and Opticschemistry.chemical_compoundchemistryMetalorganic vapour phase epitaxyGalliumSpectroscopyVisible spectrum

description

Abstract Cathodoluminescence (CL) spectrum imaging and grazing incidence X-ray diffraction (GIXRD) are employed to investigate nitride three-dimensional (3D) gallium structures. The metallic precursors are naturally obtained on a large variety of substrates by metal-organic chemical vapor deposition (CVD) with different shape/size controlled by the growth conditions, especially the temperature. These 3D metallic structures are subsequently exposed to a nitridation process in a conventional CVD reactor to form GaN nanocrystals, as confirmed by GIXRD measurements. CL spectroscopy shows visible light emission (2.5–2.8 eV) excited from the GaN in the 3D structures.

https://doi.org/10.1016/j.jlumin.2008.09.011